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Photodetector/analyzer for photoelectron spectroscopy X-ray/electron beam (CCD, MCP, etc.) High-speed sCMOS camera for soft X-ray/EUV Marana-X-Marana-X-6 ROI size 2,048 x 2,048
Photodetector/analyzer for photoelectron spectroscopy X-ray/electron beam (CCD, MCP, etc.) High-speed sCMOS camera for soft X-ray/EUV Marana-X-Tokyo Instruments, Inc

Photodetector/analyzer for photoelectron spectroscopy X-ray/electron beam (CCD, MCP, etc.) High-speed sCMOS camera for soft X-ray/EUV Marana-X
Tokyo Instruments, Inc

💻 Electronics & Electrical Use

Tokyo Instruments, Inc's Response Status

Response Rate

100.0%

Response Time

36.5hours


About This Product

■High-speed sCMOS camera for soft X-ray/EUV Marana-X

Direct imaging of soft X-rays and EUV at 100fps is possible. Lithography, ptychography applications, etc.

■High-speed sCMOS camera for soft X-ray/EUV Marana-X Product overview

Marana-X is an sCMOS camera suitable for EUV and soft X-ray applications. The back-illuminated 4.2 megapixel sCMOS sensor allows full-frame imaging at up to 74fps. Furthermore, by narrowing down the number of pixels, high-speed imaging of 100fps or 1,000fps, which surpasses conventional X-ray CCDs, is possible. In addition to imaging, it also has a spectroscopic measurement mode, allowing you to connect it to a spectrometer and perform spectrum measurements.

■Features

・Equipped with back-illuminated sCMOS sensor ・For VUV, EUV, soft X-ray detection ・High pixel: 4.2 megapixel (2,048x2,048) ・High sensitivity: maximum quantum efficiency 99% ・High speed: 74 fps (full frame), 108 fps (1,400x1,400 pixels) ・High dynamic range: up to 16bit ・Low temperature cooling: -45℃ ・Equipped with spectroscopic measurement mode

■Main uses

・In situ X-ray measurement ·tomography ・X-ray spectroscopy ・Hyperspectral imaging ・EUV lithography ・EUV Tychography

  • Product

    Photodetector/analyzer for photoelectron spectroscopy X-ray/electron beam (CCD, MCP, etc.) High-speed sCMOS camera for soft X-ray/EUV Marana-X
  • Usage Scenarios

    Electronics & Electrical Use

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1 Models of Photodetector/analyzer for photoelectron spectroscopy X-ray/electron beam (CCD, MCP, etc.) High-speed sCMOS camera for soft X-ray/EUV Marana-X

Image Part Number Price (excluding tax) Read noise Number of elements Element size Detection area Maximum quantum efficiency Maximum frame rate (fps) Dark current Control software (32bit, 64bit) Cooling temperature Mounting flange Pixel readout rate Binning Data output range Dynamic range Sensor type Shutter mode Interface ROI area
Photodetector/analyzer for photoelectron spectroscopy X-ray/electron beam (CCD, MCP, etc.) High-speed sCMOS camera for soft X-ray/EUV Marana-X-Part Number-Marana-X-6 ROI size 2,048 x 2,048

Marana-X-6 ROI size 2,048 x 2,048

Available upon quote

1.6 e- (high speed high dynamic range mode: 16bit)
1.2 e- (low noise mode: 12bit)

2,048×2,048

6.5μm×6.5μm

13.3 mm ×13.3 mm

0.99

40 (USB 3.0 16 bit)

0.15 e-/pixel/s (@-25℃)
0.10 e-/pixel/s (@-45℃)

Andor Solis
Andor SDK (C, C++, LabVIEW, Matlab compatible)

-25℃ (air cooling)
-45℃ (water cooling)

DN100CF 6 inch outer diameter fixed flange

310 MHz (high speed high dynamic range mode: 16bit)
180 MHz (low noise mode: 12bit)

2×2, 3×3, 4×4, 8×8

16bit (high speed high dynamic range mode)
12bit (low noise mode)

34,000:1 (high speed high dynamic range mode: 16bit)

Back-illuminated type
Scientific CMOS (sCMOS)

Rolling shutter

USB 3.0 or CoaXPress

13.3mm x 13.3mm

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About Company Handling This Product

Response Rate

100.0%


Response Time

36.5hrs

Company Overview

Tokyo Instruments, Inc., established in 1981, and headquartered in Tokyo, Japan, is a manufacturer of opto-ele...

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  • Japan

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