Microwave power supply, automatic matching device, etc. High-speed pulse modulation microwave power supply
Japan Koshuha Co., Ltd.
About This Product
Pulse-modulated microwave plasma is showing promise for microfabrication of semiconductor wafers. In response to this demand, we have developed a high-speed pulse modulation microwave power supply.
■Features
- Repetition frequency supports a wide range from low frequency to high frequency.
・Duty is variable from 10% to 90%.
・High-speed rise and fall without overshoot.
- By using our company's PWM switching power supply and combining it with a pulse modulation section, it is possible to support average output power of up to 5kW.
-
Product
Microwave power supply, automatic matching device, etc. High-speed pulse modulation microwave power supply
-
Handling Company
Japan Koshuha Co., Ltd.
-
Categories
1 Models of Microwave power supply, automatic matching device, etc. High-speed pulse modulation microwave power supply
| Product Image | Part Number | Price (excluding tax) | Average output power | Duty | Fall time | Frequency | Pulse output power | Repetition frequency | Rise time |
|---|---|---|---|---|---|---|---|---|---|
|
|
High speed pulse modulated microwave power supply |
Available upon quote | 200W~2kW | 10~90% (up to 85% for 100kHz) | 1μs or less | 2,450MHz | 400WP~2kWP | 1kHz~100kHz | 1μs or less |
Customers who viewed this product also viewed
Other products of Japan Koshuha Co., Ltd.
View more products of Japan Koshuha Co., Ltd.
About Company Handling This Product
- Japan