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  4. Microwave power supply, automatic matching device, etc. High-speed pulse modulation microwave power supply (Japan Koshuha Co., Ltd.)
Microwave power supply, automatic matching device, etc. High-speed pulse modulation microwave power supply-High speed pulse modulated microwave power supply
Microwave power supply, automatic matching device, etc. High-speed pulse modulation microwave power supply-Japan Koshuha Co., Ltd.

Microwave power supply, automatic matching device, etc. High-speed pulse modulation microwave power supply
Japan Koshuha Co., Ltd.

About This Product

Pulse-modulated microwave plasma is showing promise for microfabrication of semiconductor wafers. In response to this demand, we have developed a high-speed pulse modulation microwave power supply.

■Features

- Repetition frequency supports a wide range from low frequency to high frequency. ・Duty is variable from 10% to 90%. ・High-speed rise and fall without overshoot. - By using our company's PWM switching power supply and combining it with a pulse modulation section, it is possible to support average output power of up to 5kW.

  • Product

    Microwave power supply, automatic matching device, etc. High-speed pulse modulation microwave power supply

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1 Models of Microwave power supply, automatic matching device, etc. High-speed pulse modulation microwave power supply

Image Part Number Price (excluding tax) Repetition frequency Fall time Rise time Average output power Frequency Pulse output power Duty
Microwave power supply, automatic matching device, etc. High-speed pulse modulation microwave power supply-Part Number-High speed pulse modulated microwave power supply

High speed pulse modulated microwave power supply

Available upon quote

1kHz~100kHz

1μs or less

1μs or less

200W~2kW

2,450MHz

400WP~2kWP

10~90% (up to 85% for 100kHz)

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Japan Koshuha Co., Ltd.

  • Japan

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