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  4. MRAM/TMR film deposition equipment TIMARIS (Media Institute Co., Ltd.)
MRAM/TMR film deposition equipment TIMARIS-TIMARIS
MRAM/TMR film deposition equipment TIMARIS-Media Institute Co., Ltd.

MRAM/TMR film deposition equipment TIMARIS
Media Institute Co., Ltd.

About This Product

■Features

・Bridge tool concept for Ø150/200/300mm wafers ・10 cathodes in 1 deposition module ・Linear dynamic deposition method that performs deposition during linear motion ・DC, pulsed DC, RF sputtering for 10 cathodes ・Equipped with reactive sputtering function ・Surface treatment/oxidation module for TMR applications

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    MRAM/TMR film deposition equipment TIMARIS

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1 Models of MRAM/TMR film deposition equipment TIMARIS

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MRAM/TMR film deposition equipment TIMARIS-Part Number-TIMARIS

TIMARIS

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Media Institute Co., Ltd.

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