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  4. Wafer surface particle counter (Media Institute Co., Ltd.)
Wafer surface particle counter-Particle counter
Wafer surface particle counter-Media Institute Co., Ltd.

Wafer surface particle counter
Media Institute Co., Ltd.

About This Product

■Features

- Equipped with the world's first Violet LD, achieving a dramatic reduction in running costs. ・Supports various wafer sizes. (50mm~200mm) ・High performance, low price, easy operation, space saving ・Provides particle information with increased accuracy through real count processing. ・Foot space saving

  • Product

    Wafer surface particle counter

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1 Models of Wafer surface particle counter

Image Part Number Price (excluding tax) Mass (kg) Measurement target Detection sensitivity Detection/scanning method Size (mm) Reproducibility Light source Wafer size
Wafer surface particle counter-Part Number-Particle counter

Particle counter

Available upon quote

600

Bare wafer/wafer with film

Bare 80nm

Spiral scanning method

860 (W) ×900 (D) ×1,650 (H)

Σ/X ≦1% (99% or more)

Violet-LD

50mm~200mm

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About Company Handling This Product

Media Institute Co., Ltd.

  • Japan

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