Wafer surface particle counter
Media Institute Co., Ltd.
About This Product
■Features
- Equipped with the world's first Violet LD, achieving a dramatic reduction in running costs.
・Supports various wafer sizes. (50mm~200mm)
・High performance, low price, easy operation, space saving
・Provides particle information with increased accuracy through real count processing.
・Foot space saving
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Product
Wafer surface particle counter
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Handling Company
Media Institute Co., Ltd.
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Categories
1 Models of Wafer surface particle counter
| Product Image | Part Number | Price (excluding tax) | Detection sensitivity | Detection/scanning method | Light source | Mass (kg) | Measurement target | Reproducibility | Size (mm) | Wafer size |
|---|---|---|---|---|---|---|---|---|---|---|
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Particle counter |
Available upon quote | Bare 80nm | Spiral scanning method | Violet-LD | 600 | Bare wafer/wafer with film | Σ/X ≦1% (99% or more) | 860 (W) ×900 (D) ×1,650 (H) | 50mm~200mm |
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