Black light specification fully automatic UV irradiation machine FBUV-series
OHMIYA IND.CO.,LTD
About This Product
The fully automatic UV irradiation machine with black light is a device that automatically takes out the wafer frame supplied by the cassette, irradiates it with UV, and stores it. After dicing, UV irradiation reduces the adhesive strength of the tape to make it easier to pick up.
Compatible with 8inch and 12inch wafer frames with automatic setup change.
■Features
- Fully automatic irradiation is possible in cassette units.
- Rotating turntable allows for even and uniform UV irradiation.
・Various UV irradiation conditions (time setting or cumulative light intensity setting)
- Displays UV illuminance in real time on the touch panel.
・Low power consumption due to black light specification.
- Compatible with 8inch/12inch cassettes. (Setup changes can be done automatically from the touch panel)
■Interlock
Equipped with an interlock on the cover and maintenance door of the workpiece input port of the device, which will stop the operation if the door is opened during operation.
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Product
Black light specification fully automatic UV irradiation machine FBUV-series
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Handling Company
OHMIYA IND.CO.,LTD
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Categories
1 Models of Black light specification fully automatic UV irradiation machine FBUV-series
| Product Image | Part Number | Price (excluding tax) | Driving air | N₂ | Power supply | Size | UV illuminance | Weight |
|---|---|---|---|---|---|---|---|---|
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FBUV |
Available upon quote | 0.4~0.5Mpa65L/min | 0.4~0.5Mpa100L/min | AC100V50/60Hz30A | W770×D1,090×H1,200 (mm) | 9mW/cm² or more | Approximately 250kg |
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About Company Handling This Product
- Japan