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High pressure mercury specification fully automatic UV irradiation machine FHUV-series-FHUV
High pressure mercury specification fully automatic UV irradiation machine FHUV-series-OHMIYA IND.CO.,LTD

High pressure mercury specification fully automatic UV irradiation machine FHUV-series
OHMIYA IND.CO.,LTD


About This Product

High-pressure mercury/metal halide fully automatic UV irradiation equipment is an ultraviolet curing equipment that uses a lamp with strong radiant energy. After loading the workpiece, press the start button to fully automatically remove the workpiece from the magazine, UV irradiation, and storage until all the workpieces in the magazine are completed. Depending on the target work, you can choose between high-pressure mercury lamps and metal halide lamps.

■Features

・Compact body ・10 recipe settings possible (speed variable depending on settings) ・4 types of power can be set on the touch panel ・Displays cumulative irradiation amount and UV irradiation intensity (only during irradiation) ・High-pressure mercury lamp/metal halide lamp can be selected depending on the irradiation target ・Equipped with an automatic setup change function that automatically switches to a different size ・It is possible to irradiate not only the dicing frame but also the grip ring. - Equipped with a function that allows you to determine whether UV irradiation is completed or not. ・Touch panel

■Applications

Can be used for LSI wafers, memory wafers, LED wafers, laser wafers, sensor wafers, power device wafers, and other various processes.

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    High pressure mercury specification fully automatic UV irradiation machine FHUV-series

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1 Models of High pressure mercury specification fully automatic UV irradiation machine FHUV-series

Image Part Number Price (excluding tax) Driving air Power supply Weight Size UV illuminance N₂
High pressure mercury specification fully automatic UV irradiation machine FHUV-series-Part Number-FHUV

FHUV

Available upon quote

0.4Mpa or more

AC3 phase 200V50/60Hz100A

Approximately 400kg

W1,300×D1,400×H1,350 (mm)

200mW/cm² or more

0.2Mpa or more 100L/min or more

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About Company Handling This Product

Company Overview

OHMIYA IND.CO.LTD, established in 1975 and headquartered in Hiroshima, Japan, is a manufacturer and distributo...

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  • Japan

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