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  4. High-efficiency chemical filter system with HEPA filter for removing acidic, basic, and condensable organic gases Risogard -12 (Japan Donaldson Co., Ltd.)
High-efficiency chemical filter system with HEPA filter for removing acidic, basic, and condensable organic gases Risogard -12-KAX007890
High-efficiency chemical filter system with HEPA filter for removing acidic, basic, and condensable organic gases Risogard -12-Japan Donaldson Co., Ltd.

High-efficiency chemical filter system with HEPA filter for removing acidic, basic, and condensable organic gases Risogard -12
Japan Donaldson Co., Ltd.

About This Product

LITHOGUARD®-12 is a high-efficiency product with a HEPA filter for removing acidic, basic, and condensable organic gases, developed for high-end semiconductor exposure equipment such as ArF immersion lithography. rate chemical filter system. Additionally, LITHOGUARD®-12 exhibits high contaminant removal performance even in low-concentration environments, making it ideal for implementing processes that require ultra-clean environments and for preventing performance degradation due to contamination of optical system components.

■Features

・High efficiency chemical filtration (>99%) ・Long life (equipped with LPS or BSMmax filter) ・Space saving ・Low cost (filter reuse with Refill program) ・Equipped with HEPA filter (>99.97%) ・No need for power supply for operation or compressed air for airtightness (CDA, N2, etc.) ・With sampling port for gas analysis

■Filter configuration

・LPS or BSMmax chemical filter x 12 pieces ・HEPA filter x 6 pieces

  • Product

    High-efficiency chemical filter system with HEPA filter for removing acidic, basic, and condensable organic gases Risogard -12

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1 Models of High-efficiency chemical filter system with HEPA filter for removing acidic, basic, and condensable organic gases Risogard -12

Image Part Number Price (excluding tax) Setting air volume Compressed air for airtightness Approximate weight (including filter) Operation power supply Size Chemical filter part number
High-efficiency chemical filter system with HEPA filter for removing acidic, basic, and condensable organic gases Risogard -12-Part Number-KAX007890

KAX007890

Available upon quote

2,600m3/hr

Unnecessary

600kg

Unnecessary

Width 850mm x Height 1,850mm x Depth 1,200mm

P512612

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About Company Handling This Product

Japan Donaldson Co., Ltd.

  • Japan

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