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  4. LITHOGUARD® POINT OF USE FILTERS Inline Chemical Filters LITHOGUARD POU Filters (Japan Donaldson Co., Ltd.)
LITHOGUARD® POINT OF USE FILTERS Inline Chemical Filters LITHOGUARD POU Filters-P511554
LITHOGUARD® POINT OF USE FILTERS Inline Chemical Filters LITHOGUARD POU Filters-Japan Donaldson Co., Ltd.

LITHOGUARD® POINT OF USE FILTERS Inline Chemical Filters LITHOGUARD POU Filters
Japan Donaldson Co., Ltd.

Japan Donaldson Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

15.4hours

Relatively Fast Response

About This Product

Donaldson's Resogard POU (Point-Of-Use) filter is a pipe-connected chemical filter for removing contaminants such as basics, acids, and organic gases. Risogard POU filters are used in processes that require the supply of higher purity CDA (clean dry air), inert gas, and compressed air, such as semiconductor manufacturing, various development experiments/evaluation tests, and protection of laser processing machines and optical equipment. Ideal for use in.

■Applications

・Semiconductor manufacturing, various development experiments/evaluation test processes ・Protection of laser processing machines, optical equipment, etc.

■Features

・Can be used to remove contaminants from compressed air, CDA (clean dry air), N2, and other inert gases ・Stainless steel (SUS304) is used for the filter body case. ・Collects acidic, basic, and organic gases in passing gas through physical and chemical adsorption. ・In addition to removing gaseous pollutants, it also has a high particle removal function. ・Can be used at pressures up to 1MPaG ・Connect with fittings such as screws, VCR, tubes, etc.

  • Product

    LITHOGUARD® POINT OF USE FILTERS Inline Chemical Filters LITHOGUARD POU Filters

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1 Models of LITHOGUARD® POINT OF USE FILTERS Inline Chemical Filters LITHOGUARD POU Filters

Image Part Number Price (excluding tax) Fitting Approximate weight (kg) Recommended maximum flow rate (SLPM) Size
LITHOGUARD® POINT OF USE FILTERS Inline Chemical Filters LITHOGUARD POU Filters-Part Number-P511554

P511554

Available upon quote

1/4" tube

1.3

50

2.5" size

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About Company Handling This Product

Japan Donaldson Co., Ltd.

Response Rate

100.0%

Response Time

15.4hrs

  • Japan

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