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  4. Microscope Wafer Load (Daruka Sangyo Co., Ltd.)
Microscope Wafer Load-Wafer transfer device
Microscope Wafer Load-Daruka Sangyo Co., Ltd.

Microscope Wafer Load
Daruka Sangyo Co., Ltd.

About This Product

■Summary

A system that automatically transports wafers and glass-related products to the equipment regardless of the inspection equipment. ・Fully automatic transport in cassette units using dedicated software ・Selection of measurement wafer on transfer side Manual transfer possible ・Wafer detection system realizes efficient takt time ・Highly reliable transport with highly repeatable drive system ・Transfer to various stages on the equipment side

■Equipment features

・Can be transported regardless of microscope manufacturer ・Full-automatic transport is possible in combination with an automatic stage (communication with the inspection equipment is required) ・Manual transport mode

  • Product

    Microscope Wafer Load

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1 Models of Microscope Wafer Load

Image Part Number Price (excluding tax) Equipment dimensions Utility Glass size Cassette Orientation flat/notch detection Wafer transport/holding Wafer thickness Wafer size
Microscope Wafer Load-Part Number-Wafer transfer device

Wafer transfer device

Available upon quote

6 inch tabletop type 600 (W) ×670 (D) ×670 (H)

Power AC100V ±10%
Vacuum -800hPa/Positive pressure

Corner 50mm~300mm

Confirm each time Multiple types can be considered

Transmissive sensor

Vacuum adsorption mechanical transport

400μ~1500μ
*For sizes other than these, a transportation test is required.

Φ100mm~300mm

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About Company Handling This Product

Daruka Sangyo Co., Ltd.

  • Japan

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Industrial Microscopes
Industrial Microscopes　Daruka Sangyo Co., Ltd.
Daruka Sangyo Co., Ltd.

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