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  4. Microguard UPX Cartridge Filter Hydrophobic UPE Filter (Irie Co., Ltd.)
Microguard UPX Cartridge Filter Hydrophobic UPE Filter-U.P.E.
Microguard UPX Cartridge Filter Hydrophobic UPE Filter-Irie Co., Ltd.

Microguard UPX Cartridge Filter Hydrophobic UPE Filter
Irie Co., Ltd.

About This Product

■Excellent wettability

The surface energy of the film is higher than that of PTFE, so it has excellent wettability with photoresist solvents. This can be expected to shorten initial startup time and reduce the amount of chemical waste.

■Membrane using new manufacturing method

The ultra-high molecular weight polyethylene membrane was completed using a unique new manufacturing method.

■Low adsorption

・Low adsorption of surfactants in general photoresists has been confirmed. ・Products made by ISO registered certified factories

  • Product

    Microguard UPX Cartridge Filter Hydrophobic UPE Filter

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1 Models of Microguard UPX Cartridge Filter Hydrophobic UPE Filter

Image Part Number Price (excluding tax) Maximum operating temperature Maximum allowable reverse differential pressure Maximum allowable positive differential pressure Pore ​​diameter Microguard UPX Micro guard Filter Core, support Key O-ring
Microguard UPX Cartridge Filter Hydrophobic UPE Filter-Part Number-U.P.E.

U.P.E.

Available upon quote

60℃

0.24 MPa at 25℃

0.34 MPa at 25℃

0.05 μm, 0.1 μm, 0.2 μm, 0.5 μm, 1.0 μm

4 inch type: 5,000 cm2 10 inch type: 11,000 cm2

10 inch type: 8,500 cm2 20 inch type: 17,000 cm2 30 inch type: 25,500 cm2

Ultra High Molecular Weight Polyethylene

High Density Polyethylene

PFA (only with Chemlock key)

O-ring EPDM or coated fluoro rubber (E-FKM) (Standard AS568A-222)

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About Company Handling This Product

Irie Co., Ltd.

  • Japan

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