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  4. Excimer light treatment system Excimer UVO3 cleaning reformer 6inch compatible tabletop model E172 -152 (Excimer Co., Ltd.)
Excimer light treatment system Excimer UVO3 cleaning reformer 6inch compatible tabletop model E172 -152-E172 -152
Excimer light treatment system Excimer UVO3 cleaning reformer 6inch compatible tabletop model E172 -152-Excimer Co., Ltd.

Excimer light treatment system Excimer UVO3 cleaning reformer 6inch compatible tabletop model E172 -152
Excimer Co., Ltd.

Excimer Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

6.6hours

Fast Response

About This Product

It contributes to applications such as surface modification using ultraviolet light with a wavelength of 172 nm for purposes such as "wettability," "adhesion," "uniformity," "normality," and "decomposition." We offer simple products and highly reliable products based on our extensive experience.

■Application examples

・Pretreatment of electron microscope samples ・Cleaning of samples and jigs ・Improvement of wettability, hydrophilicity, and affinity of sample surface ・Improved adhesion of bonded surfaces ・Surface modification ・After cleaning wafers and glass surfaces, decomposing residual organic matter and cleaning ・Improvement of uniformity before film formation and coating on wafer and glass surfaces

■Features

・Compatible with work size 6” (152mm) ・Stage transport excimer UV scan irradiation method ・Process parameters (irradiation speed, number of irradiations, irradiation distance) ・Optional process parameters (N2 purge, heater stage) ・Equipped with ozone abatement processing unit ・Wavelength 172nm Xe excimer UV lamp Short time precision processing at room temperature using photochemical reaction ・Utility, AC100V power only ・Door interlock equipment ・Space-saving tabletop model ・No mercury lamp used

■Achieves high process performance with a simple basic design.

Photochemical reaction surface treatment using an excimer UV light source does not easily raise the temperature of the irradiated object due to the characteristics of the light source, making it possible to perform low-temperature surface treatment on objects that are easily affected by heat, such as film materials. Additionally, unlike physical surface treatments such as plasma, photochemical reactions are characterized by precision processing that is less likely to cause damage to the workpiece. No vacuum pump required, built-in ozone removal unit

  • Product

    Excimer light treatment system Excimer UVO3 cleaning reformer 6inch compatible tabletop model E172 -152

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1 Models of Excimer light treatment system Excimer UVO3 cleaning reformer 6inch compatible tabletop model E172 -152

Image Part Number Price (excluding tax) Continuous lighting operation Wavelength Target work size Regular inspection Regular replacement parts External dimensions Initial illuminance Utility
Excimer light treatment system Excimer UVO3 cleaning reformer 6inch compatible tabletop model E172 -152-Part Number-E172 -152

E172 -152

Available upon quote

Within 10 minutes (due to lightweight and compact air-cooled design)

172nm

6” (□152 mm)

High voltage power supply, lamp light source, etc. 1 year or as appropriate

Exhaust ozone decomposition unit recommended 1 year or replaced as appropriate

195 (W) × 380 (D) x480 (H) mm*

20mW/cm2 or more

Power supply AC100V 50/60Hz 2A

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About Company Handling This Product

Excimer Co., Ltd.

Response Rate

100.0%

Response Time

6.6hrs

  • Japan

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