Excimer light treatment system Excimer UVO3 cleaning reformer 6inch compatible tabletop model E172 -152
Excimer Co., Ltd.
About This Product
It contributes to applications such as surface modification using ultraviolet light with a wavelength of 172 nm for purposes such as "wettability," "adhesion," "uniformity," "normality," and "decomposition." We offer simple products and highly reliable products based on our extensive experience.
■Application examples
・Pretreatment of electron microscope samples
・Cleaning of samples and jigs
・Improvement of wettability, hydrophilicity, and affinity of sample surface
・Improved adhesion of bonded surfaces
・Surface modification
・After cleaning wafers and glass surfaces, decomposing residual organic matter and cleaning
・Improvement of uniformity before film formation and coating on wafer and glass surfaces
■Features
・Compatible with work size 6” (152mm)
・Stage transport excimer UV scan irradiation method
・Process parameters (irradiation speed, number of irradiations, irradiation distance)
・Optional process parameters (N2 purge, heater stage)
・Equipped with ozone abatement processing unit
・Wavelength 172nm Xe excimer UV lamp Short time precision processing at room temperature using photochemical reaction
・Utility, AC100V power only
・Door interlock equipment
・Space-saving tabletop model
・No mercury lamp used
■Achieves high process performance with a simple basic design.
Photochemical reaction surface treatment using an excimer UV light source does not easily raise the temperature of the irradiated object due to the characteristics of the light source, making it possible to perform low-temperature surface treatment on objects that are easily affected by heat, such as film materials. Additionally, unlike physical surface treatments such as plasma, photochemical reactions are characterized by precision processing that is less likely to cause damage to the workpiece.
No vacuum pump required, built-in ozone removal unit
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Product
Excimer light treatment system Excimer UVO3 cleaning reformer 6inch compatible tabletop model E172 -152
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Handling Company
Excimer Co., Ltd.
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Categories
1 Models of Excimer light treatment system Excimer UVO3 cleaning reformer 6inch compatible tabletop model E172 -152
| Product Image | Part Number | Price (excluding tax) |
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E172 -152 |
Available upon quote |
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About Company Handling This Product
- Japan