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  4. Excimer light processing system Compact excimer UV172nm light source E500-172-160 (Excimer Co., Ltd.)
Excimer light processing system Compact excimer UV172nm light source E500-172-160-E500-172-160
Excimer light processing system Compact excimer UV172nm light source E500-172-160-Excimer Co., Ltd.

Excimer light processing system Compact excimer UV172nm light source E500-172-160
Excimer Co., Ltd.

About This Product

It contributes to applications such as surface modification using ultraviolet light with a wavelength of 172 nm for purposes such as "wettability," "adhesion," "uniformity," "normality," and "decomposition." We offer simple products and highly reliable products based on our extensive experience. A lamp compatible with 6" wafer and mask substrates. Features include a simple and compact configuration, highly reliable air cooling, and a long-life excimer lamp that does not require lamp tube replacement. Power source is AC100V.

■Long-life air-cooled excimer lamp. No need to replace lamp tube

Originally, excimer UV lamps have a structure that does not have electrodes inside the bulb, so in theory they are considered long-life lamps, and are sometimes referred to as permanent excimer lamps overseas. However, excimer lamps that pursue high illuminance these days tend to have shorter lamp lifespans due to lighter and thinner tube materials, higher tube temperatures, and glass distortion due to ultraviolet energy, resulting in higher costs. Based on many years of field experience and results, Excimer Co., Ltd.'s air-cooled compact excimer lamps require periodic replacement of the external electrodes, high voltage cables, and high voltage parts as maintenance, but the expensive lamp tube itself does not need to be replaced. We have achieved low cost and high reliability.

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    Excimer light processing system Compact excimer UV172nm light source E500-172-160

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1 Models of Excimer light processing system Compact excimer UV172nm light source E500-172-160

Image Part Number Price (excluding tax)
Excimer light processing system Compact excimer UV172nm light source E500-172-160-Part Number-E500-172-160

E500-172-160

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About Company Handling This Product

Excimer Co., Ltd.

  • Japan

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