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  4. AlN susceptor for high purity MOCVD (OSTECH Co., Ltd.)

AlN susceptor for high purity MOCVD
OSTECH Co., Ltd.

About This Product

■Features

A susceptor with a thermal expansion coefficient matching that of silicon, high thermal conductivity and thermal emissivity, and high heat uniformity. The material is high purity FAN-090 (99.9%), which has excellent plasma resistance and fluorine gas corrosion resistance. It is possible to manufacture large sizes. (Maximum size: 465mm in diameter)

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    AlN susceptor for high purity MOCVD

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1 Models of AlN susceptor for high purity MOCVD

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AlN susceptor for high purity MOCVD

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About Company Handling This Product

OSTECH Co., Ltd.

  • Japan

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