ULVAC Sales Co., Ltd.'s Etching Equipment

■Summary The high-density plasma etching system NE-550EX for research and development is a magnetic field ICP (ISM=Inductively Super Magnetron) typ...

• Machining / Machine Tools

• Etching Equipment

■Summary The NE-5700/NE-7800 dry etching equipment for mass production is a scalable etching equipment that supports from one chamber to multiple c...

• Machining / Machine Tools

• Etching Equipment

■Summary NLD dry etching for research and development NLD-570 is a dry etching system equipped with low pressure, low electron temperature, and hig...

• Machining / Machine Tools

• Etching Equipment

■Summary The NLD-5700 dry etching system for opto-devices and MEMS is a dry etching system for mass production equipped with a magnetic neutral lin...

• Machining / Machine Tools

• Etching Equipment

■Summary The batch type natural oxide film removal device RISETM-300 is a batch type pre-clean device that can remove difficult natural oxide films...

• Machining / Machine Tools

• Etching Equipment

■Summary The high-density plasma dry etching system ULHITETM NE-7800H is a multi-chamber type low-pressure, high-density plasma that is compatible ...

• Machining / Machine Tools

• Etching Equipment