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  4. Clean conveyance system Vacuum robot High vacuum compatible High vacuum robot MTP series (TAZMO CO.,LTD.)
Clean conveyance system Vacuum robot High vacuum compatible High vacuum robot MTP series-MTP-BB3-2
Clean conveyance system Vacuum robot High vacuum compatible High vacuum robot MTP series-TAZMO CO.,LTD.

Clean conveyance system Vacuum robot High vacuum compatible High vacuum robot MTP series
TAZMO CO.,LTD.

About This Product

It achieves low vibration and noise, making it compatible with next-generation semiconductor manufacturing equipment.

■Product features

- Compatible with vacuum environment of 10^-6Pa due to adoption of all-axis AC servo motors and unique structure. ・Specifications without lifting (Z-axis) are also available. ・This is a vacuum robot with a branch structure that minimizes the turning radius of the double hand and maximizes the transfer distance.

  • Product

    Clean conveyance system Vacuum robot High vacuum compatible High vacuum robot MTP series

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1 Models of Clean conveyance system Vacuum robot High vacuum compatible High vacuum robot MTP series

Image Part Number Price (excluding tax) Applicable work Communication method Mass Vacuum resistance Repeatability Operating range Utility Wafer grip confirmation Wafer gripping method
Clean conveyance system Vacuum robot High vacuum compatible High vacuum robot MTP series-Part Number-MTP-BB3-2

MTP-BB3-2

Available upon quote

Φ100mm~Φ300mmSEMI/JEITA standard product 6inch MASK

RS232C,RS-485 (serial communication)

Main unit: Approx. 76kg Controller (MCQ): Approx. 16kg

10^-6Pa

X,Y direction: ±0.1mmZ axis: ±0.05mm

R-axis: 330mm (maximum arm reach, excluding end effector) T-axis: 370° (origin: ±185°) Z-axis: 104mm

Power supply: Single phase AC200V ~ 230V±10% 5A 1 system

N/A

Drop-in

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About Company Handling This Product

TAZMO CO.,LTD.

Company Overview

TAZMO CO., LTD., founded in 1972 and based in Okayama, Japan, is a manufacturer and distributor of advanced ma...

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  • Japan

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