Clean conveyance system Vacuum robot High vacuum compatible High vacuum robot MTP series
TAZMO CO.,LTD.
About This Product
It achieves low vibration and noise, making it compatible with next-generation semiconductor manufacturing equipment.
■Product features
- Compatible with vacuum environment of 10^-6Pa due to adoption of all-axis AC servo motors and unique structure.
・Specifications without lifting (Z-axis) are also available.
・This is a vacuum robot with a branch structure that minimizes the turning radius of the double hand and maximizes the transfer distance.
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Product
Clean conveyance system Vacuum robot High vacuum compatible High vacuum robot MTP series
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Handling Company
TAZMO CO.,LTD.
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Categories
1 Models of Clean conveyance system Vacuum robot High vacuum compatible High vacuum robot MTP series
| Product Image | Part Number | Price (excluding tax) | Applicable work | Communication method | Mass | Operating range | Repeatability | Utility | Vacuum resistance | Wafer grip confirmation | Wafer gripping method |
|---|---|---|---|---|---|---|---|---|---|---|---|
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MTP-BB3-2 |
Available upon quote | Φ100mm~Φ300mmSEMI/JEITA standard product 6inch MASK | RS232C,RS-485 (serial communication) | Main unit: Approx. 76kg Controller (MCQ): Approx. 16kg | R-axis: 330mm (maximum arm reach, excluding end effector) T-axis: 370° (origin: ±185°) Z-axis: 104mm | X,Y direction: ±0.1mmZ axis: ±0.05mm | Power supply: Single phase AC200V ~ 230V±10% 5A 1 system | 10^-6Pa | N/A | Drop-in |
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About Company Handling This Product
- Japan