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  4. Nanoimprint fully automatic mass production equipment DYAD ® TIW series (TAZMO CO.,LTD.)
Nanoimprint fully automatic mass production equipment DYAD ® TIW series-DYAD®
Nanoimprint fully automatic mass production equipment DYAD ® TIW series-TAZMO CO.,LTD.

Nanoimprint fully automatic mass production equipment DYAD ® TIW series
TAZMO CO.,LTD.

About This Product

Φ8/12 inch UV curing specification

■Product features

・Fully automatic mass production equipment (coating, drying, alignment, laminating, peeling) ・Φ8/12 inch UV curing specification ・Supports optical devices such as AR/VR/MR, 3D sensors, etc. ・Alignment accuracy ±1μ ・Supports high aspect and slanted ・Industry-proven units and transfer robots ・Development of release material

  • Product

    Nanoimprint fully automatic mass production equipment DYAD ® TIW series

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1 Models of Nanoimprint fully automatic mass production equipment DYAD ® TIW series

Image Part Number Price (excluding tax) Wafer size Unit transport Unit coating Unit Imprint Unit Cool Unit Cassette Unit Bake Remover Option
Nanoimprint fully automatic mass production equipment DYAD ® TIW series-Part Number-DYAD®

DYAD®

Available upon quote

200mm/300mm

Robot made by TAZMO

Spin coat Max 3,000rpm

UV irradiation type

Plate Type/Water cooling type

FOUP 25 steps

Plate Type Max 250°C

No release material required

Bonding accuracy ±1μm or less

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About Company Handling This Product

TAZMO CO.,LTD.

Company Overview

TAZMO CO., LTD., founded in 1972 and based in Okayama, Japan, is a manufacturer and distributor of advanced ma...

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  • Japan

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Coating Process Equipment
Coating Process Equipment　TAZMO CO.,LTD.
TAZMO CO.,LTD.

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