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  4. CMP slurry supply system Powder oxidizer (APS) dissolution/supply system (TAZMO CO.,LTD.)
CMP slurry supply system Powder oxidizer (APS) dissolution/supply system-CMP slurry supply system Powder oxidizer (APS) dissolution/supply system
CMP slurry supply system Powder oxidizer (APS) dissolution/supply system-TAZMO CO.,LTD.

CMP slurry supply system Powder oxidizer (APS) dissolution/supply system
TAZMO CO.,LTD.

About This Product

This equipment is compatible with powdered oxidizing agents (APS) used in metal CMP processes. Powder dissolution, aqueous solution concentration adjustment, and supply to CMP can be performed on-site.

■Product features

・Drum cabinet with powder dissolving function. -The supply device is based on New MX2000 or iSIS1200J. ・Centralized supply to multiple CMP devices is possible. ・Driving operation, various settings, and instrument monitor using touch panel. - Monitoring functions such as alarm history, stock drum barcode management, and operation data logging. - Maintenance functions such as manual operation and automatic cleaning. - Equipped with a concentration meter and filter. - Supports various customizations such as changing powder container size. - Examples of auxiliary units include valve boxes, power panels, monitoring panels, etc.

  • Product

    CMP slurry supply system Powder oxidizer (APS) dissolution/supply system

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1 Models of CMP slurry supply system Powder oxidizer (APS) dissolution/supply system

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CMP slurry supply system Powder oxidizer (APS) dissolution/supply system-Part Number-CMP slurry supply system Powder oxidizer (APS) dissolution/supply system

CMP slurry supply system Powder oxidizer (APS) dissolution/supply system

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About Company Handling This Product

TAZMO CO.,LTD.

Company Overview

TAZMO CO., LTD., founded in 1972 and based in Okayama, Japan, is a manufacturer and distributor of advanced ma...

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  • Japan

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