Nanoprobe/Nano measurement processing machine Nanoprober (Ultra High Vacuum) UMP1000-4P
Unisoku Co., Ltd.
About This Product
This stage is ideal for nano/micromanipulation probing under scanning electron microscopy (SEM). UMP-1000-4P is a manipulator/prober that can operate in three axes of XYZ at the nanometer level. The standard configuration consists of 4 XYZ 3-axis piezo stages, 1 sample stage, and 1 stage controller.
■Features
・Each probe can control the XYZ axes as an actuator. Ideal for measuring electrical properties at any location on the semiconductor surface
・Small and lightweight, can be attached to commercially available SEMs
・Can operate in ultra-high vacuum and ultra-low temperature environments
-Easy to use user interface. The XYZ movements of each probe can be easily controlled using a notebook PC.
・Supports multi-probing (standard 4 probe stages, number of stages can be changed)
・Can be used for a wide range of applications such as manipulation, semiconductor nanodevice IV measurement, resistance measurement, EBIC measurement, etc.
■Applications
・Fine adjustment of deep needle position on the order of nanometers under SEM observation (probing)
・Probing in a wide range of environments from the atmosphere to ultra-high vacuum, from room temperature to extremely low temperatures
・Minute manipulation on the nanometer order, semiconductor nanodevice IV measurement, resistance measurement, EBIC measurement
■Configuration
・Nanoprobe stage unit 1 set (H36×W116×D116)
・Control power supply 2 units (H88×W430×D350)
・1 control computer (A4 size or B5 size)
・10 Pt:Ir probes
・Included tools: 1 set
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Product
Nanoprobe/Nano measurement processing machine Nanoprober (Ultra High Vacuum) UMP1000-4P
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Handling Company
Unisoku Co., Ltd.
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Categories
1 Models of Nanoprobe/Nano measurement processing machine Nanoprober (Ultra High Vacuum) UMP1000-4P
| Product Image | Part Number | Price (excluding tax) | Sample size | Weight | XY-axis movement linear control | XY-axis travel amount pulse control | Z-axis travel amount pulse control | Z-axis travel linear control |
|---|---|---|---|---|---|---|---|---|
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UMP1000-4P |
Available upon quote | Maximum 10 mm × 10 mm, thickness within 1 mm | 1,000g or less | 1μm or less | ± 2.5 mm | ± 1.5 mm | 1μm or less |
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About Company Handling This Product
- Japan