Tabletop mask aligner EMA-400
Union Optical Co., Ltd.
About This Product
■Summary
This product is a space-saving mask aligner that is easy to handle, has high performance, and is low-priced, making it ideal for use in university and corporate laboratories.The features of this product are the first in its class to include a dual objective microscope, an integrator lens (illumination system) ), allowing for highly accurate alignment and printing.
■Features
・Adoption of 2-field microscope
・LED used as observation light source
・Adoption of integrator lens
■Applications (for micromachine research and development in private laboratories, university laboratories, etc.)
・Solvents, new materials, actuators, pressure sensors, acceleration sensors, power devices, etc.
・For flip chip/BGA/CSP processing
・For processing optical communication/high-speed communication components
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Product
Tabletop mask aligner EMA-400
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Handling Company
Union Optical Co., Ltd.
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Categories
1 Models of Tabletop mask aligner EMA-400
| Product Image | Part Number | Price (excluding tax) | Alignment accuracy | Alignment method | Alignment scope | Exposure lighting | Exposure mode | Installation size | Installation weight | Mask size | Resolution | Utility | Wafer size | Wafer stage |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
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EMA-400 |
Available upon quote | ±3μm | Manual alignment by moving the wafer stage |
Dual objective microscope 2 x 10x objective lenses (N.A.=0.15, W.D.=30mm) Objective distance 15~75mm Total magnification 100x |
250W ultra high pressure mercury lamp Optical method Integrator lens method Illuminance unevenness ±5% or less Illuminance 20mW/cm2 (405nm) Effective exposure range φ100mm Exposure: Rotary solenoid driven by digital timer |
Soft contact | 735 (W) x490 (D) x605 (H) mm | Approximately 90kg | □5 inches | 3μm |
Power supply AC100V/15A50/60Hz Vacuum (pressure) 21.3kPa (-80kPa from atmosphere) |
Φ4 inch |
XY stage stroke ±5mm θ rotation stroke ±5° Z axis stroke 0~4mm |
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About Company Handling This Product
- Japan