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  4. Tabletop mask aligner EMA-400 (Union Optical Co., Ltd.)
Tabletop mask aligner EMA-400-EMA-400
Tabletop mask aligner EMA-400-Union Optical Co., Ltd.

Tabletop mask aligner EMA-400
Union Optical Co., Ltd.

Union Optical Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

10.5hours

Fast Response

About This Product

■Summary

This product is a space-saving mask aligner that is easy to handle, has high performance, and is low-priced, making it ideal for use in university and corporate laboratories.The features of this product are the first in its class to include a dual objective microscope, an integrator lens (illumination system) ), allowing for highly accurate alignment and printing.

■Features

・Adoption of 2-field microscope ・LED used as observation light source ・Adoption of integrator lens

■Applications (for micromachine research and development in private laboratories, university laboratories, etc.)

・Solvents, new materials, actuators, pressure sensors, acceleration sensors, power devices, etc. ・For flip chip/BGA/CSP processing ・For processing optical communication/high-speed communication components

  • Product

    Tabletop mask aligner EMA-400

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1 Models of Tabletop mask aligner EMA-400

Image Part Number Price (excluding tax) Exposure lighting Exposure mode Installation weight Installation size Resolution Utility Mask size Wafer stage Wafer size Alignment accuracy Alignment method Alignment scope
Tabletop mask aligner EMA-400-Part Number-EMA-400

EMA-400

Available upon quote

250W ultra high pressure mercury lamp
Optical method Integrator lens method
Illuminance unevenness ±5% or less
Illuminance 20mW/cm2 (405nm)
Effective exposure range φ100mm
Exposure: Rotary solenoid driven by digital timer

Soft contact

Approximately 90kg

735 (W) x490 (D) x605 (H) mm

3μm

Power supply AC100V/15A50/60Hz
Vacuum (pressure) 21.3kPa (-80kPa from atmosphere)

□5 inches

XY stage stroke ±5mm
θ rotation stroke ±5°
Z axis stroke 0~4mm

Φ4 inch

±3μm

Manual alignment by moving the wafer stage

Dual objective microscope
2 x 10x objective lenses (N.A.=0.15, W.D.=30mm)
Objective distance 15~75mm
Total magnification 100x

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About Company Handling This Product

Union Optical Co., Ltd.

Response Rate

100.0%

Response Time

10.5hrs

  • Japan

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