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  4. RJ-CA type (natural refrigerant chiller) (Ebara Refrigeration Systems Co., Ltd.)
RJ-CA type (natural refrigerant chiller)-RJ-CA
RJ-CA type (natural refrigerant chiller)-Ebara Refrigeration Systems Co., Ltd.

RJ-CA type (natural refrigerant chiller)
Ebara Refrigeration Systems Co., Ltd.

Ebara Refrigeration Systems Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

13.3hours

Relatively Fast Response

About This Product

■Summary

A chiller for semiconductor manufacturing equipment that uses natural refrigerant (CO2). Ebara's inverter control technology and built-in ultra-compact canned pump save space and energy. Temperature control within ±0.1℃ is possible, contributing to improved process stability and yield. ・Uses natural refrigerant (CO2) (GWP=1) ・Precise temperature control ・Energy saving ・Space saving

  • Product

    RJ-CA type (natural refrigerant chiller)

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1 Models of RJ-CA type (natural refrigerant chiller)

Image Part Number Price (excluding tax) Power supply V Operation control method Mass kg Temperature control accuracy ℃ Temperature control range ℃ Circulating fluid pressure pump capacity L/min Circulating fluid Fluid used External dimensions (WxDxH) mm Cooling capacity (50Hz/60Hz) kW Cooling water temperature range ℃ Refrigerant used Standard
RJ-CA type (natural refrigerant chiller)-Part Number-RJ-CA

RJ-CA

Available upon quote

Three phase 200

Inverter control method

185 (excluding circulating fluid and cooling water)

±0.1

-20~70

20 (0.25MPa)

FC-3283, HT-200, etc.

370x950x1,100

2.0 (at -20℃) 3.8 (at -10℃)

10~25

R744 (CO2GWP:1)

SEMI, CE, UL compliant

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About Company Handling This Product

Ebara Refrigeration Systems Co., Ltd.

Response Rate

100.0%

Response Time

13.3hrs

  • Japan

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Temperature Controllers
Temperature Controllers　Ebara Refrigeration Systems Co., Ltd.
Ebara Refrigeration Systems Co., Ltd.

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