All Categories

History

  1. Metoree
  2. Measuring Equipment
  3. Interferometers
  4. Vibration measurement device Speed ​​sensor Sagnac interferometer vibration observation device (Neoark Co., Ltd.)
Vibration measurement device Speed ​​sensor Sagnac interferometer vibration observation device-MLD-101C
Vibration measurement device Speed ​​sensor Sagnac interferometer vibration observation device-Neoark Co., Ltd.

Vibration measurement device Speed ​​sensor Sagnac interferometer vibration observation device
Neoark Co., Ltd.

About This Product

■Visualize high-frequency vibration distribution

MEMS technology is now used not only in the electronics industry such as semiconductors, but also in various fields such as physical property research, biotechnology, and device development. In the field of wireless communications, this MEMS technology is being used to develop devices that can be used in the high frequency range. Sagnac interferometer vibration observation equipment can visualize the vibration distribution of high frequency devices in the GHz band (piezoelectric thin films, SAW filters, FBAR, etc.).

■Supports observation frequencies up to 6GHz. High frequency probing available upon request.

Supports vibration observation up to 6GHz for vibration observation of 5G devices. It is also compatible with the installation of a high-frequency probe, making it possible to drive devices and observe vibrations at the wafer level. One device can be used to analyze the vibration distribution of various devices such as SAW filters and BAW filters.

■High-speed data collection by laser scanning

Data collection uses a scanning method using a moving probe laser. Setting the data collection interval in the X-axis direction to a minimum of 0.1 µm does not change the data collection speed. The data collection interval in the Y-axis direction can also be set to a minimum of 0.1 µm.

■Dedicated observation software with a variety of functions

The dedicated observation software created specifically for this device includes not only the basic control functions necessary for microscope operation, but also a variety of functions such as sample tilt correction and focus correction functions. The signal generator for driving the elastic waves on the sample and the sensitivity settings of the lock-in amplifier can also be operated on the software. A frequency table setting function is also implemented to continuously measure data at different drive frequencies.

■Focus correction function (Auto Focus)

Equipped with a function that performs focus correction every time data is collected for any number of lines in the Y direction to prevent focus shifts due to temperature changes, etc. during long-term data collection. Set the XYZ coordinates of the four sides of the observation range and the focus correction point in advance. Then, when collecting data, the amount of defocus at the focus correction point is detected, and the focus direction is corrected by adding the amount of defocus.

  • Product

    Vibration measurement device Speed ​​sensor Sagnac interferometer vibration observation device

Share this product


230+ people viewing

Last viewed: 3 hours ago

Free
Get started with our free quotation service - no cost, no obligation.

No Phone Required
We respect your privacy. You can receive quotes without sharing your phone number.

3 Models of Vibration measurement device Speed ​​sensor Sagnac interferometer vibration observation device

Click on the part number for more information about each product

Image Part Number Price (excluding tax) Observation method Observation frequency Device configuration External dimensions (weight) Vibration detection method Compatible sample Light source/observation axis Attached objective lens magnification Rack external dimensions (weight) Utility Mapping (electric control) Focus (electric control) Data recording format
Vibration measurement device Speed ​​sensor Sagnac interferometer vibration observation device-Part Number-MLD-101C

MLD-101C

Available upon quote

Laser irradiation position scanning observation using stage control

500MHz~3GHz (Type A)
3GHz~6GHz (Type B)

Main body (optical system/stage)
laser power supply
stage driver
frequency conversion unit
lock-in amplifier
Signal generator (2ch)
PC, display
observation software

600 (W) × 600 (D) × 1350 (H) mm
(approx. 270kg)

Amplitude and phase detection using Sagnac interferometer

Device with SMA connector

Semiconductor laser (observation axis: out-of-plane direction *out-of-plane vibration detection)

×100 (W.D. 12mm, spot diameter 1μm typ.), ×50 (W.D. 3.4mm, spot diameter 5μm typ.)
*×5 (for observation position confirmation)

600 (W) × 630 (D) × 1,600 (H) mm
(approx. 40kg)

AC100V, power consumption 1.7kVA or less

Mapping position resolution: 0.1µm, maximum mapping (observation) range: 25×25mm

Focus position resolution: 0.2μm, focus range: ±15mm

Image: JPEG, Video: AVI, Amplitude/Phase information: CSV

Vibration measurement device Speed ​​sensor Sagnac interferometer vibration observation device-Part Number-MLD-101P

MLD-101P

Available upon quote

Laser irradiation position scanning observation using stage control

500MHz~3GHz (Type A)
3GHz~6GHz (Type B)

Main body (optical system/stage)
laser power supply
stage driver
frequency conversion unit
lock-in amplifier
Signal generator (2ch)
PC, display
observation software

600 (W) × 600 (D) × 1350 (H) mm
(approx. 270kg)

Amplitude and phase detection using Sagnac interferometer

Wafer (up to 8 inches)

Semiconductor laser (observation axis: out-of-plane direction *out-of-plane vibration detection)

×100 (W.D. 12mm, spot diameter 1μm typ.), ×50 (W.D. 3.4mm, spot diameter 5μm typ.)
*×5 (for observation position confirmation)

600 (W) × 630 (D) × 1,600 (H) mm
(approx. 40kg)

AC100V, power consumption 1.7kVA or less

Mapping position resolution: 0.1µm, maximum mapping (observation) range: 25×25mm

Focus position resolution: 0.2μm, focus range: ±15mm

Image: JPEG, Video: AVI, Amplitude/Phase information: CSV

Vibration measurement device Speed ​​sensor Sagnac interferometer vibration observation device-Part Number-MLD-103

MLD-103

Available upon quote

Laser irradiation position scanning observation using stage control

500MHz~3GHz

Main body (optical system/stage)
Laser power supply *Built-in
Stage driver *Built-in
Frequency conversion unit *Built-in
Lock-in amplifier*Built-in
Signal generator (2ch)
Notebook PC
observation software

300 (W) ×450 (D) ×450 (H) mm
(approx. 30kg)

Amplitude and phase detection using Sagnac interferometer

Device with SMA connector

Semiconductor laser (observation axis: out-of-plane direction *out-of-plane vibration detection)

×100 (W.D. 12mm, spot diameter 1μm typ.), ×50 (W.D. 3.4mm, spot diameter 5μm typ.)
*×5 (for observation position confirmation)

No rack required
(External equipment installed around the desk)

AC100V, power consumption 1.7kVA or less

Mapping position resolution: 0.1µm, maximum mapping (observation) range: 25×25mm

Focus position resolution: 0.2μm, focus range: ±15mm

Image: JPEG, Video: AVI, Amplitude/Phase information: CSV

Click on the part number for more information about each product

Customers who viewed this product also viewed

Reviews shown here are reviews of companies.

Nano roughness height measuring instrument Nano Seven TN-A1-Tsukumo Engineering Co., Ltd.

Nano roughness height measuring instrument Nano Seven TN-A1

Tsukumo Engineering Co., Ltd.

240+ people viewing

Last viewed: 13 hours ago

Response time: 0.56 hours

Interferometers

4 models listed

Fizeau type general purpose laser interferometer-IR System Co., Ltd.

Fizeau type general purpose laser interferometer

IR System Co., Ltd.

160+ people viewing

Response time: 59.70 hours

Interferometers

2 models listed

Radial Shearing Interferometer-Opto Device Corporation Co., Ltd.

Radial Shearing Interferometer

Opto Device Corporation Co., Ltd.

410+ people viewing

Last viewed: 45 minutes ago

Interferometers

4 models listed

In-line interferometer-Opto Device Corporation Co., Ltd.

In-line interferometer

Opto Device Corporation Co., Ltd.

310+ people viewing

Last viewed: 6 hours ago

Interferometers

2 models listed

0.50 inch diameter NIR integrated Michelson interferometer INT05-N-Irie Co., Ltd.

0.50 inch diameter NIR integrated Michelson interferometer INT05-N

Irie Co., Ltd.

4.8

150+ people viewing

Response time: 13.00 hours

Interferometers
Laser interferometer SP-Optoscience Co., Ltd.

Laser interferometer SP

Optoscience Co., Ltd.

190+ people viewing

Last viewed: 15 hours ago

Response time: 37.32 hours

Interferometers

2 models listed

Fiber end face interferometer VFI-1200-Optoscience Co., Ltd.

Fiber end face interferometer VFI-1200

Optoscience Co., Ltd.

170+ people viewing

Last viewed: 11 hours ago

Response time: 37.32 hours

Interferometers

2 models listed

Measurement system compatible with white interference 3D displacement meter WI-5000 series compatible measurement system-COMS Co., Ltd.

Measurement system compatible with white interference 3D displacement meter WI-5000 series compatible measurement system

COMS Co., Ltd.

200+ people viewing

Last viewed: 2 hours ago

Response time: 20.96 hours

Interferometers

2 models listed

Park NX-Hybrid WLI, the world's first hybrid semiconductor measurement device that combines atomic force microscope and white light interference technology-Park Systems Japan Co., Ltd.

Park NX-Hybrid WLI, the world's first hybrid semiconductor measurement device that combines atomic force microscope and white light interference technology

Park Systems Japan Co., Ltd.

290+ people viewing

Last viewed: 1 hour ago

Response time: 26.42 hours

Interferometers

3 models listed

Mechanical property measurement (nanomechanics) & thermal property measurement Laser interference displacement measurement-Oxford Instruments Ltd.

Mechanical property measurement (nanomechanics) & thermal property measurement Laser interference displacement measurement

Oxford Instruments Ltd.

5.0

370+ people viewing

Response time: 26.08 hours

Interferometers

4 models listed

Direct measurement of cantilever deflection Laser interferometric displacement measurement (IDS)-Oxford Instruments Ltd.

Direct measurement of cantilever deflection Laser interferometric displacement measurement (IDS)

Oxford Instruments Ltd.

5.0

370+ people viewing

Response time: 26.08 hours

Interferometers

3 models listed

Spectrometer/Spectrometer Combination of interferometer module, detector module, and light source module FTIR-OEM module for installation-Tokyo Instruments, Inc

Spectrometer/Spectrometer Combination of interferometer module, detector module, and light source module FTIR-OEM module for installation

Tokyo Instruments, Inc

150+ people viewing

Last viewed: 6 hours ago

Response time: 23.21 hours

Interferometers

3 models listed

See More Interferometers Products

Other products of Neoark Co., Ltd.

Reviews shown here are reviews of companies.

Maskless exposure system PALET manual stage model DDB-701-MS-Neoark Co., Ltd.

Maskless exposure system PALET manual stage model DDB-701-MS

Neoark Co., Ltd.

5.0

370+ people viewing

Last viewed: 29 minutes ago

Response time: 33.63 hours

FPD Lithography Equipment

4 models listed

Maskless exposure equipment PALET electric stage model DDB-701-DL-Neoark Co., Ltd.

Maskless exposure equipment PALET electric stage model DDB-701-DL

Neoark Co., Ltd.

5.0

380+ people viewing

Last viewed: 39 minutes ago

Response time: 33.63 hours

FPD Lithography Equipment

4 models listed

Maskless exposure system PALET large stage model DDB-701-DL4-Neoark Co., Ltd.

Maskless exposure system PALET large stage model DDB-701-DL4

Neoark Co., Ltd.

5.0

260+ people viewing

Last viewed: 39 minutes ago

Response time: 33.63 hours

FPD Lithography Equipment

4 models listed

Maskless exposure equipment 3D shape laser exposure equipment-Neoark Co., Ltd.

Maskless exposure equipment 3D shape laser exposure equipment

Neoark Co., Ltd.

5.0

250+ people viewing

Last viewed: 39 minutes ago

Response time: 33.63 hours

FPD Lithography Equipment

4 models listed

Achieving a highly accurate optical comb (frequency scale) Optical comb (optical frequency comb)-Neoark Co., Ltd.

Achieving a highly accurate optical comb (frequency scale) Optical comb (optical frequency comb)

Neoark Co., Ltd.

5.0

190+ people viewing

Last viewed: 21 hours ago

Response time: 33.63 hours

Optical Communications
Stabilized laser Mode-balanced frequency stabilized He-Ne laser-Neoark Co., Ltd.

Stabilized laser Mode-balanced frequency stabilized He-Ne laser

Neoark Co., Ltd.

5.0

180+ people viewing

Last viewed: 2 hours ago

Response time: 33.63 hours

Laser Light Sources
Stabilized laser Axial Zeeman frequency stabilized He-Ne laser-Neoark Co., Ltd.

Stabilized laser Axial Zeeman frequency stabilized He-Ne laser

Neoark Co., Ltd.

5.0

160+ people viewing

Last viewed: 53 minutes ago

Response time: 33.63 hours

Laser Light Sources
Stabilized laser Iodine stabilized He-Ne laser-Neoark Co., Ltd.

Stabilized laser Iodine stabilized He-Ne laser

Neoark Co., Ltd.

5.0

150+ people viewing

Last viewed: 15 hours ago

Response time: 33.63 hours

Laser Light Sources
Stabilized Laser Offset Lock He-Ne Laser-Neoark Co., Ltd.

Stabilized Laser Offset Lock He-Ne Laser

Neoark Co., Ltd.

5.0

180+ people viewing

Last viewed: 1 hour ago

Response time: 33.63 hours

Laser Light Sources
Stabilized laser Output stabilized He-Ne laser-Neoark Co., Ltd.

Stabilized laser Output stabilized He-Ne laser

Neoark Co., Ltd.

5.0

180+ people viewing

Last viewed: 6 hours ago

Response time: 33.63 hours

Laser Light Sources
Laser marking small green LD marking DMGS series-Neoark Co., Ltd.

Laser marking small green LD marking DMGS series

Neoark Co., Ltd.

5.0

190+ people viewing

Last viewed: 6 hours ago

Response time: 33.63 hours

Laser Light Sources

2 models listed

Magneto-optical effect measurement device Hard disk perpendicular magnetic recording layer evaluation device-Neoark Co., Ltd.

Magneto-optical effect measurement device Hard disk perpendicular magnetic recording layer evaluation device

Neoark Co., Ltd.

5.0

180+ people viewing

Last viewed: 12 hours ago

Response time: 33.63 hours

Optical Measuring Machines

View more products of Neoark Co., Ltd.

About Company Handling This Product

Neoark Co., Ltd.

  • Japan

Related search keywords

Interferometers
Interferometers　Neoark Co., Ltd.
Neoark Co., Ltd.

This is the version of our website addressed to speakers of English in the United States. If you are a resident of another country, please select the appropriate version of Metoree for your country in the drop-down menu.

Copyright © 2025 Metoree