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  4. Vibration measurement device Speed ​​sensor Sagnac interferometer vibration observation device (Neoark Co., Ltd.)
Vibration measurement device Speed ​​sensor Sagnac interferometer vibration observation device-MLD-101C
Vibration measurement device Speed ​​sensor Sagnac interferometer vibration observation device-Neoark Co., Ltd.

Vibration measurement device Speed ​​sensor Sagnac interferometer vibration observation device
Neoark Co., Ltd.

Neoark Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

41.8hours

About This Product

■Visualize high-frequency vibration distribution

MEMS technology is now used not only in the electronics industry such as semiconductors, but also in various fields such as physical property research, biotechnology, and device development. In the field of wireless communications, this MEMS technology is being used to develop devices that can be used in the high frequency range. Sagnac interferometer vibration observation equipment can visualize the vibration distribution of high frequency devices in the GHz band (piezoelectric thin films, SAW filters, FBAR, etc.).

■Supports observation frequencies up to 6GHz. High frequency probing available upon request.

Supports vibration observation up to 6GHz for vibration observation of 5G devices. It is also compatible with the installation of a high-frequency probe, making it possible to drive devices and observe vibrations at the wafer level. One device can be used to analyze the vibration distribution of various devices such as SAW filters and BAW filters.

■High-speed data collection by laser scanning

Data collection uses a scanning method using a moving probe laser. Setting the data collection interval in the X-axis direction to a minimum of 0.1 µm does not change the data collection speed. The data collection interval in the Y-axis direction can also be set to a minimum of 0.1 µm.

■Dedicated observation software with a variety of functions

The dedicated observation software created specifically for this device includes not only the basic control functions necessary for microscope operation, but also a variety of functions such as sample tilt correction and focus correction functions. The signal generator for driving the elastic waves on the sample and the sensitivity settings of the lock-in amplifier can also be operated on the software. A frequency table setting function is also implemented to continuously measure data at different drive frequencies.

■Focus correction function (Auto Focus)

Equipped with a function that performs focus correction every time data is collected for any number of lines in the Y direction to prevent focus shifts due to temperature changes, etc. during long-term data collection. Set the XYZ coordinates of the four sides of the observation range and the focus correction point in advance. Then, when collecting data, the amount of defocus at the focus correction point is detected, and the focus direction is corrected by adding the amount of defocus.

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    Vibration measurement device Speed ​​sensor Sagnac interferometer vibration observation device

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3 Models of Vibration measurement device Speed ​​sensor Sagnac interferometer vibration observation device

Click on the part number for more information about each product

Image Part Number Price (excluding tax) Observation method Observation frequency Device configuration External dimensions (weight) Vibration detection method Compatible sample Light source/observation axis Attached objective lens magnification Rack external dimensions (weight) Utility Mapping (electric control) Focus (electric control) Data recording format
Vibration measurement device Speed ​​sensor Sagnac interferometer vibration observation device-Part Number-MLD-101C

MLD-101C

Available upon quote

Laser irradiation position scanning observation using stage control

500MHz~3GHz (Type A)
3GHz~6GHz (Type B)

Main body (optical system/stage)
laser power supply
stage driver
frequency conversion unit
lock-in amplifier
Signal generator (2ch)
PC, display
observation software

600 (W) × 600 (D) × 1350 (H) mm
(approx. 270kg)

Amplitude and phase detection using Sagnac interferometer

Device with SMA connector

Semiconductor laser (observation axis: out-of-plane direction *out-of-plane vibration detection)

×100 (W.D. 12mm, spot diameter 1μm typ.), ×50 (W.D. 3.4mm, spot diameter 5μm typ.)
*×5 (for observation position confirmation)

600 (W) × 630 (D) × 1,600 (H) mm
(approx. 40kg)

AC100V, power consumption 1.7kVA or less

Mapping position resolution: 0.1µm, maximum mapping (observation) range: 25×25mm

Focus position resolution: 0.2μm, focus range: ±15mm

Image: JPEG, Video: AVI, Amplitude/Phase information: CSV

Vibration measurement device Speed ​​sensor Sagnac interferometer vibration observation device-Part Number-MLD-101P

MLD-101P

Available upon quote

Laser irradiation position scanning observation using stage control

500MHz~3GHz (Type A)
3GHz~6GHz (Type B)

Main body (optical system/stage)
laser power supply
stage driver
frequency conversion unit
lock-in amplifier
Signal generator (2ch)
PC, display
observation software

600 (W) × 600 (D) × 1350 (H) mm
(approx. 270kg)

Amplitude and phase detection using Sagnac interferometer

Wafer (up to 8 inches)

Semiconductor laser (observation axis: out-of-plane direction *out-of-plane vibration detection)

×100 (W.D. 12mm, spot diameter 1μm typ.), ×50 (W.D. 3.4mm, spot diameter 5μm typ.)
*×5 (for observation position confirmation)

600 (W) × 630 (D) × 1,600 (H) mm
(approx. 40kg)

AC100V, power consumption 1.7kVA or less

Mapping position resolution: 0.1µm, maximum mapping (observation) range: 25×25mm

Focus position resolution: 0.2μm, focus range: ±15mm

Image: JPEG, Video: AVI, Amplitude/Phase information: CSV

Vibration measurement device Speed ​​sensor Sagnac interferometer vibration observation device-Part Number-MLD-103

MLD-103

Available upon quote

Laser irradiation position scanning observation using stage control

500MHz~3GHz

Main body (optical system/stage)
Laser power supply *Built-in
Stage driver *Built-in
Frequency conversion unit *Built-in
Lock-in amplifier*Built-in
Signal generator (2ch)
Notebook PC
observation software

300 (W) ×450 (D) ×450 (H) mm
(approx. 30kg)

Amplitude and phase detection using Sagnac interferometer

Device with SMA connector

Semiconductor laser (observation axis: out-of-plane direction *out-of-plane vibration detection)

×100 (W.D. 12mm, spot diameter 1μm typ.), ×50 (W.D. 3.4mm, spot diameter 5μm typ.)
*×5 (for observation position confirmation)

No rack required
(External equipment installed around the desk)

AC100V, power consumption 1.7kVA or less

Mapping position resolution: 0.1µm, maximum mapping (observation) range: 25×25mm

Focus position resolution: 0.2μm, focus range: ±15mm

Image: JPEG, Video: AVI, Amplitude/Phase information: CSV

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About Company Handling This Product

Neoark Co., Ltd.

Response Rate

100.0%

Response Time

41.8hrs

  • Japan

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