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Vibration measurement device Speed sensor Sagnac interferometer vibration observation deviceHandling Company
Neoark Co., Ltd.Categories
Click on the part number for more information about each product
Image | Part Number | Price (excluding tax) | Observation method | Observation frequency | Device configuration | External dimensions (weight) | Vibration detection method | Compatible sample | Light source/observation axis | Attached objective lens magnification | Rack external dimensions (weight) | Utility | Mapping (electric control) | Focus (electric control) | Data recording format |
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MLD-101C |
Available upon quote |
Laser irradiation position scanning observation using stage control |
500MHz~3GHz (Type A) |
Main body (optical system/stage) |
600 (W) × 600 (D) × 1350 (H) mm |
Amplitude and phase detection using Sagnac interferometer |
Device with SMA connector |
Semiconductor laser (observation axis: out-of-plane direction *out-of-plane vibration detection) |
×100 (W.D. 12mm, spot diameter 1μm typ.), ×50 (W.D. 3.4mm, spot diameter 5μm typ.) |
600 (W) × 630 (D) × 1,600 (H) mm |
AC100V, power consumption 1.7kVA or less |
Mapping position resolution: 0.1µm, maximum mapping (observation) range: 25×25mm |
Focus position resolution: 0.2μm, focus range: ±15mm |
Image: JPEG, Video: AVI, Amplitude/Phase information: CSV |
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MLD-101P |
Available upon quote |
Laser irradiation position scanning observation using stage control |
500MHz~3GHz (Type A) |
Main body (optical system/stage) |
600 (W) × 600 (D) × 1350 (H) mm |
Amplitude and phase detection using Sagnac interferometer |
Wafer (up to 8 inches) |
Semiconductor laser (observation axis: out-of-plane direction *out-of-plane vibration detection) |
×100 (W.D. 12mm, spot diameter 1μm typ.), ×50 (W.D. 3.4mm, spot diameter 5μm typ.) |
600 (W) × 630 (D) × 1,600 (H) mm |
AC100V, power consumption 1.7kVA or less |
Mapping position resolution: 0.1µm, maximum mapping (observation) range: 25×25mm |
Focus position resolution: 0.2μm, focus range: ±15mm |
Image: JPEG, Video: AVI, Amplitude/Phase information: CSV |
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MLD-103 |
Available upon quote |
Laser irradiation position scanning observation using stage control |
500MHz~3GHz |
Main body (optical system/stage) |
300 (W) ×450 (D) ×450 (H) mm |
Amplitude and phase detection using Sagnac interferometer |
Device with SMA connector |
Semiconductor laser (observation axis: out-of-plane direction *out-of-plane vibration detection) |
×100 (W.D. 12mm, spot diameter 1μm typ.), ×50 (W.D. 3.4mm, spot diameter 5μm typ.) |
No rack required |
AC100V, power consumption 1.7kVA or less |
Mapping position resolution: 0.1µm, maximum mapping (observation) range: 25×25mm |
Focus position resolution: 0.2μm, focus range: ±15mm |
Image: JPEG, Video: AVI, Amplitude/Phase information: CSV |
Click on the part number for more information about each product
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Response Rate
100.0%
Response Time
33.6hrs
Company Review
5.0