Spectral and pulse monitoring system EMICON SA-HIPIMS-EMICON SA-HIPIMS

Spectral and pulse monitoring system EMICON SA-HIPIMS
Sputtering Components Japan Co., Ltd.

About This Product

EMICON SA-HIPIMS" is an upgraded model of "EMICON SA" with a particular focus on the HIPIMS process. During film formation, pulse voltage and current values ​​are recorded with high resolution along with plasma spectrum data.

This unique fusion control technology simultaneously and independently controls these two closed loops: a closed loop with the power supply that focuses on ion density, and a closed loop with MFC that focuses on gas flow rate. This technology provides stoichiometrically and morphologically stable deposition, especially in reactive deposition processes using oxygen.

■Application・Plasma composition analysis in HIPIMS process (Note)
・Process monitoring and optimization throughout target life
・Independent control of gas flow and ion density in a closed loop
・Observation of target erosion and process correction caused by it
・Detection of abnormalities such as leaks in the chamber
・Detection of target usage limit (BT, BP surface exposure)
Note: Rather than targeting a single pre-targeted spectrum (wavelength) like traditional filter-based PEM monitors, it monitors all spectra that appear within the sensor's range. Therefore, accurate composition analysis of gas is possible.

■Features・Monitor all spectra that appear within the sensing range of the sensor
・Recording electrical signals with high resolution
・Real-time recording of current and voltage in pulse process (HIPIMS)
・Monitoring and analysis of pulse curves
・Simultaneous pulse and spectrum recording with analog and optical trigger inputs
・Real-time spectral and electrical fusion control
・LAN control using dedicated software on Windows OS

Model
There are 1 models for this product.

Product
Spectral and pulse monitoring system EMICON SA-HIPIMS

Handling Company
Sputtering Components Japan Co., Ltd.

Categories

Business Efficiency Systems / Software

Operational Monitoring

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1 Models of Spectral and pulse monitoring system EMICON SA-HIPIMS

Image	Part Number	Price (excluding tax)	Pulse trigger input	Type	Number of spectrometer channels	Sampling rate	Support fieldbus	Connection	Analog pulse input	Analog control output
	EMICON SA-HIPIMS	Available upon quote	Analog ±5V (1x), optical (2x)	U.A.	1-8	40MHz	Profibus, Profinet, EtherCAT, EtherNET/IP, OPC	LAN (TCP/IP)	±1V (2x)	0-10 volts (4/8)

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