Water-cooled sputter DC power supply HX series 15kW-35kW-HX150/400 (13Z010)

Water-cooled sputter DC power supply HX series 15kW-35kW
Sputtering Components Japan Co., Ltd.

About This Product

The extremely compact design, with a width of 218 mm and a height of 222 mm, does not require a special cabinet and can be integrated directly into equipment. The HX series has a mounting flange that allows it to be installed anywhere in the plasma chamber. Its control display can be adjusted to an adjustable viewing angle and can be detached from the main body if necessary.

Efficient water cooling systems are reliable even in non-air conditioned environments. To prevent cooling water condensation, an external magnetic valve can be connected via the built-in temperature control device.

The total output can be expanded to 280kW by connecting in parallel. The special circuit design allows master-slave operation as well as parallel connection via an interface combiner or PLC. The extremely fast arc control is performed completely automatically, so there is no need for any detailed parameter settings by the user.

■Features・A total of 15 models from output 15kW to 35kW
・Can be expanded to 280kW by parallel connection
・Water cooling
・Magnetic valve control
・Built-in dust removal ventilation mechanism
・Height 222mm x Width 218mm x Depth 645mm
・Flange mounting possible
・M8 female screw for connecting crane eye
・Angle-variable and separable display
・Fully automatic arc control

This AM2/3 can expand the output by connecting up to three DC power supplies of the same series (GX, HX, GSW) in parallel. In that case, the controllers will be integrated into one. These DC power supplies can also be linked with pulse generators and can be controlled collectively via this AM2/3 interface combiner. For example, in the case of HX350/800, the center frequency can be expanded to 105kW.

The MS4 interface combiner allows up to four power supplies of the same type to be connected in a master-slave manner. For example, when four HX350s are linked together, the output can be expanded to 140kW. If the output is still insufficient, you can use the S4 interface extension to link up to 8 power supplies, increasing the output to 280kW.

It can also be connected to a pulse generator and can be controlled all at once via the MS4 interface combiner. In this case, the center frequency can be expanded to 280kW.

*Other model numbers are available.

Model
There are 10 models for this product.

Product
Water-cooled sputter DC power supply HX series 15kW-35kW

Handling Company
Sputtering Components Japan Co., Ltd.

Categories

Power Supplies

DC Power Supplies

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Last viewed: 5 hours ago

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10 Models of Water-cooled sputter DC power supply HX series 15kW-35kW

Click on the part number for more information about each product

Part Number	Price (excluding tax)	DC-output
HX150/400 (13Z010)	Available upon quote	15kW 400V 80A
HX150/500 (13Z020)	Available upon quote	15kW 500V 60A
HX150/600 (13Z030)	Available upon quote	15kW 600V 50A
HX150/800 (13Z040)	Available upon quote	15kW 800V 30A
HX150/1000 (13Z050)	Available upon quote	15kW 1000V 25A
HX200/500 (13Z100)	Available upon quote	20kW 500V 70A
HX200/800 (13Z110)	Available upon quote	20kW 800V 40A
HX200/1000 (13Z120)	Available upon quote	20kW 1000V 35A
HX250/500 (13Z190)	Available upon quote	25kW 500V 80A
HX250/800 (13Z200)	Available upon quote	25kW 800V 50A

Click on the part number for more information about each product

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