Water-cooled sputter DC power supply HXF series 15kW-30kW-HXF150/500 (13Z410)

Water-cooled sputter DC power supply HXF series 15kW-30kW
Sputtering Components Japan Co., Ltd.

About This Product

HXF was developed specifically for sensitive and damage-prone deposition applications. Its fully automatic arc control system suppresses its arc energy to less than 0.3mj/kW. HXF is particularly electrically and mechanically compatible with our HX series, and also includes an interface for cooperation with pulse generators. Its small body allows for storage in equipment peripherals or for direct attachment to the chamber itself.

The highly efficient water cooling system also provides maximum performance even in environments where the temperature is not tightly controlled by air conditioning. To prevent condensation of water droplets, an external magnetic valve can be connected via the integrated temperature control unit. In addition, the output can be expanded to a maximum of 240kW by connecting in parallel.

■Features・Output from 15kW to 30kW, 6 models in total
・Can be expanded to 240kW by parallel connection
・Water cooling method
・Magnetic valve control
・Particle removal mechanism
・Compact design with height 222mm x depth 645mm x width 218mm
・Direct flange mounting to equipment possible
・With M8 female screw for crane eye installation
・Removable and rotatable display
・Fully automatic control of abnormal discharge

Model
There are 6 models for this product.

Product
Water-cooled sputter DC power supply HXF series 15kW-30kW

Handling Company
Sputtering Components Japan Co., Ltd.

Categories

Power Supplies

DC Power Supplies

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6 Models of Water-cooled sputter DC power supply HXF series 15kW-30kW

Click on the part number for more information about each product

Part Number	Price (excluding tax)	DC-output
HXF150/500 (13Z410)	Available upon quote	15kW 500V 60A
HXF150/600 (13Z420)	Available upon quote	15kW 400V 50A
HXF150/800 (13Z430)	Available upon quote	15kW 800V 30A
HXF200/800 (13Z460)	Available upon quote	20kW 800V 40A
HXF250/800 (13Z480)	Available upon quote	25kW 800V 50A
HXF300/800 (13Z490)	Available upon quote	30kW 800V 60A

Click on the part number for more information about each product

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