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  4. Sputter power supply Pulse generator Unipolar pulse generator SD series 15kW-35kW (Sputtering Components Japan Co., Ltd.)
Sputter power supply Pulse generator Unipolar pulse generator SD series 15kW-35kW-SD151
Sputter power supply Pulse generator Unipolar pulse generator SD series 15kW-35kW-Sputtering Components Japan Co., Ltd.

Sputter power supply Pulse generator Unipolar pulse generator SD series 15kW-35kW
Sputtering Components Japan Co., Ltd.

About This Product

When combined with ADL's DC power supply, the SD151/SD301 and SD351 generate unipolar pulses with reverse pulses for faster discharge. By using a reverse pulse, extremely fast, fully automatic arc suppression reduces arc energy by approximately 50% compared to the SD150/SD300 without a reverse pulse. This generator operates at a fixed frequency of 20kHz. On the other hand, if you connect an external signal generator, it will be possible to vary the signal from 1kHz to 40kHz. Additionally, up to 8 pulse generators can be automatically synchronized via a control cable. The latest electronics in the SD151, SD301, and SD351 minimize delay times and, as a result, eliminate the need for a master oscillator even when power supplies with high voltage outputs are used in parallel. , accurately synchronize.

■Features

・Reverse pulse ・Output is 15kW, 30kW, 35kW ・Can be connected in parallel up to 280kW ・Automatic arc control ・Air cooling ・Compact design, 1/2 19 inch - 3 half rack ・Floating output

  • Product

    Sputter power supply Pulse generator Unipolar pulse generator SD series 15kW-35kW

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4 Models of Sputter power supply Pulse generator Unipolar pulse generator SD series 15kW-35kW

Click on the part number for more information about each product

Image Part Number Price (excluding tax) Part number Pulse output (kW) Pulse output (kHz) Pulse output (V)
Sputter power supply Pulse generator Unipolar pulse generator SD series 15kW-35kW-Part Number-SD151

SD151

Available upon quote

11Z020

15kW

20kHz

800V

Sputter power supply Pulse generator Unipolar pulse generator SD series 15kW-35kW-Part Number-SD301

SD301

Available upon quote

11Z040

30kW

20kHz

800V

Sputter power supply Pulse generator Unipolar pulse generator SD series 15kW-35kW-Part Number-SD301/500

SD301/500

Available upon quote

11Z047

30kW

20kHz

500V

Sputter power supply Pulse generator Unipolar pulse generator SD series 15kW-35kW-Part Number-SD351

SD351

Available upon quote

11Z055

30kW

20kHz

800V

Click on the part number for more information about each product

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Sputtering Components Japan Co., Ltd.

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