Sputter power supply Pulse generator Unipolar pulse generator SD series 15kW-35kW-SD151

Sputter power supply Pulse generator Unipolar pulse generator SD series 15kW-35kW
Sputtering Components Japan Co., Ltd.

Sputtering Components Japan Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

9.6hours

Fast Response

About This Product

When combined with ADL's DC power supply, the SD151/SD301 and SD351 generate unipolar pulses with reverse pulses for faster discharge. By using a reverse pulse, extremely fast, fully automatic arc suppression reduces arc energy by approximately 50% compared to the SD150/SD300 without a reverse pulse.

This generator operates at a fixed frequency of 20kHz. On the other hand, if you connect an external signal generator, it will be possible to vary the signal from 1kHz to 40kHz. Additionally, up to 8 pulse generators can be automatically synchronized via a control cable.

The latest electronics in the SD151, SD301, and SD351 minimize delay times and, as a result, eliminate the need for a master oscillator even when power supplies with high voltage outputs are used in parallel. , accurately synchronize.

■Features・Reverse pulse
・Output is 15kW, 30kW, 35kW
・Can be connected in parallel up to 280kW
・Automatic arc control
・Air cooling
・Compact design, 1/2 19 inch - 3 half rack
・Floating output

Model
There are 4 models for this product.

Product
Sputter power supply Pulse generator Unipolar pulse generator SD series 15kW-35kW

Handling Company
Sputtering Components Japan Co., Ltd.

Categories

Generators

Pulse Generators

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4 Models of Sputter power supply Pulse generator Unipolar pulse generator SD series 15kW-35kW

Click on the part number for more information about each product

Part Number	Price (excluding tax)	Part number	Pulse output (kW)	Pulse output (kHz)	Pulse output (V)
SD151	Available upon quote	11Z020	15kW	20kHz	800V
SD301	Available upon quote	11Z040	30kW	20kHz	800V
SD301/500	Available upon quote	11Z047	30kW	20kHz	500V
SD351	Available upon quote	11Z055	30kW	20kHz	800V

Click on the part number for more information about each product

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