Sputter power supply Pulse generator Unipolar pulse generator SD series 15kW-35kW
Sputtering Components Japan Co., Ltd.
About This Product
When combined with ADL's DC power supply, the SD151/SD301 and SD351 generate unipolar pulses with reverse pulses for faster discharge. By using a reverse pulse, extremely fast, fully automatic arc suppression reduces arc energy by approximately 50% compared to the SD150/SD300 without a reverse pulse.
This generator operates at a fixed frequency of 20kHz. On the other hand, if you connect an external signal generator, it will be possible to vary the signal from 1kHz to 40kHz. Additionally, up to 8 pulse generators can be automatically synchronized via a control cable.
The latest electronics in the SD151, SD301, and SD351 minimize delay times and, as a result, eliminate the need for a master oscillator even when power supplies with high voltage outputs are used in parallel. , accurately synchronize.
■Features
・Reverse pulse
・Output is 15kW, 30kW, 35kW
・Can be connected in parallel up to 280kW
・Automatic arc control
・Air cooling
・Compact design, 1/2 19 inch - 3 half rack
・Floating output
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Product
Sputter power supply Pulse generator Unipolar pulse generator SD series 15kW-35kW
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Handling Company
Sputtering Components Japan Co., Ltd.
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Categories
4 Models of Sputter power supply Pulse generator Unipolar pulse generator SD series 15kW-35kW
Items marked with have different values depending on the model number.
Click on the part number for more information about each product
| Product Image | Part Number | Price (excluding tax) | Part number | Pulse output (V) | Pulse output (kHz) | Pulse output (kW) |
|---|---|---|---|---|---|---|
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SD151 |
Available upon quote | 11Z020 | 800V | 20kHz | 15kW |
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SD301 |
Available upon quote | 11Z040 | 800V | 20kHz | 30kW |
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SD301/500 |
Available upon quote | 11Z047 | 500V | 20kHz | 30kW |
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SD351 |
Available upon quote | 11Z055 | 800V | 20kHz | 30kW |
Click on the part number for more information about each product
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