Sputter power supply Pulse generator Unipolar pulse generator HXD series 90kW-HXD140kW-HXD901

Sputter power supply Pulse generator Unipolar pulse generator HXD series 90kW-HXD140kW
Sputtering Components Japan Co., Ltd.

Sputtering Components Japan Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

9.6hours

Fast Response

About This Product

If you are looking for high power, easy operation, and stable processes, using HXD901-HXD1401 is the easiest solution. The modular unipolar pulse generator optimizes reactive process deposition with cathodes up to 4 m long.

The generator is fully automatic, aware of all relevant process parameters and independently controls its arc detection and arc removal. No manual adjustments are required when restarting operations or replacing targets. In addition, its extremely high cooling efficiency ensures high reliability even if it is used in an environment without an air conditioner installed.

■Features・Output is from 90kW to 140kW
・Water cooling
・Magnetic valve control
- Ideal for reactive processes with cathodes up to 4m long
・Ideal for targets where arc suppression is important
・Fully automatic arc control (0.3mJ/kW)
・Automatic output control
・High-speed discharge using reverse pulse

Model
There are 4 models for this product.

Product
Sputter power supply Pulse generator Unipolar pulse generator HXD series 90kW-HXD140kW

Handling Company
Sputtering Components Japan Co., Ltd.

Categories

Generators

Pulse Generators

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4 Models of Sputter power supply Pulse generator Unipolar pulse generator HXD series 90kW-HXD140kW

Click on the part number for more information about each product

Part Number	Price (excluding tax)	Product number	Pulse output (kW)	Pulse output (kHz)	Pulse output (V)
HXD901	Available upon quote	14Z210	90kW	20kHz	800V
HXD1051	Available upon quote	14Z220	105kW	20kHz	800V
HXD1201	Available upon quote	14Z230	120kW	20kHz	800V
HXD1401	Available upon quote	14Z240	140kW	20kHz	800V

Click on the part number for more information about each product

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