Sputter power supply Pulse generator Unipolar pulse generator HXD series 90kW-HXD140kW
Sputtering Components Japan Co., Ltd.
About This Product
If you are looking for high power, easy operation, and stable processes, using HXD901-HXD1401 is the easiest solution. The modular unipolar pulse generator optimizes reactive process deposition with cathodes up to 4 m long.
The generator is fully automatic, aware of all relevant process parameters and independently controls its arc detection and arc removal. No manual adjustments are required when restarting operations or replacing targets. In addition, its extremely high cooling efficiency ensures high reliability even if it is used in an environment without an air conditioner installed.
■Features
・Output is from 90kW to 140kW
・Water cooling
・Magnetic valve control
- Ideal for reactive processes with cathodes up to 4m long
・Ideal for targets where arc suppression is important
・Fully automatic arc control (0.3mJ/kW)
・Automatic output control
・High-speed discharge using reverse pulse
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Product
Sputter power supply Pulse generator Unipolar pulse generator HXD series 90kW-HXD140kW
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Handling Company
Sputtering Components Japan Co., Ltd.
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Categories
4 Models of Sputter power supply Pulse generator Unipolar pulse generator HXD series 90kW-HXD140kW
Items marked with have different values depending on the model number.
Click on the part number for more information about each product
| Product Image | Part Number | Price (excluding tax) | Product number | Pulse output (V) | Pulse output (kHz) | Pulse output (kW) |
|---|---|---|---|---|---|---|
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HXD901 |
Available upon quote | 14Z210 | 800V | 20kHz | 90kW |
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HXD1051 |
Available upon quote | 14Z220 | 800V | 20kHz | 105kW |
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HXD1201 |
Available upon quote | 14Z230 | 800V | 20kHz | 120kW |
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HXD1401 |
Available upon quote | 14Z240 | 800V | 20kHz | 140kW |
Click on the part number for more information about each product
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