Sputter power supply pulse generator bipolar pulse generator SB series 15kW-35kW-SB150

Sputter power supply pulse generator bipolar pulse generator SB series 15kW-35kW
Sputtering Components Japan Co., Ltd.

Sputtering Components Japan Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

9.6hours

Fast Response

About This Product

This pulse generator can be used for both symmetrical MFAC current replacement and bipolar pulsing to form asymmetrical rectangular pulses. With the power ratio controller, it is possible to bring the left and right lifetimes of dual targets closer to the ultimate.

Additionally, if different materials are mounted on the left and right targets, it is possible to intentionally change the pulse output. The power ratio controller automatically adjusts its pulse duration via pulse width moderation (PWM). This generator always operates at 20kHz. It also has a fully automatic arcing suppression mechanism.

Trip level and break time parameters are automatically adjusted according to the process. There is no need for any settings by the user. For automatic tuning, multiple generators can be connected via control cables. At this time, the generator automatically switches to external reception mode and has the ability to synchronize with other generators.

■Features・Output is 15kW, 35kW AC
・Parallel connection possible up to 280kW
・Left and right power ratio adjustable
・Automatic arcing control mechanism
・Automatic tuning mechanism
・Water cooling
・Compact design

Model
There are 2 models for this product.

Product
Sputter power supply pulse generator bipolar pulse generator SB series 15kW-35kW

Handling Company
Sputtering Components Japan Co., Ltd.

Categories

Generators

Pulse Generators

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Last viewed: 17 hours ago

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2 Models of Sputter power supply pulse generator bipolar pulse generator SB series 15kW-35kW

Click on the part number for more information about each product

Image	Part Number	Price (excluding tax)	Product number	DC-output (kHz)	DC-output (W)	DC-output (+/–V)
	SB150	Available upon quote	11Z070	20kHz	15kW	800V
	SB300	Available upon quote	11Z050	20kHz	35kW	800V

Click on the part number for more information about each product

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