Sputter power supply pulse generator bipolar pulse generator SB series 15kW-35kW
Sputtering Components Japan Co., Ltd.
About This Product
This pulse generator can be used for both symmetrical MFAC current replacement and bipolar pulsing to form asymmetrical rectangular pulses. With the power ratio controller, it is possible to bring the left and right lifetimes of dual targets closer to the ultimate.
Additionally, if different materials are mounted on the left and right targets, it is possible to intentionally change the pulse output. The power ratio controller automatically adjusts its pulse duration via pulse width moderation (PWM). This generator always operates at 20kHz. It also has a fully automatic arcing suppression mechanism.
Trip level and break time parameters are automatically adjusted according to the process. There is no need for any settings by the user. For automatic tuning, multiple generators can be connected via control cables. At this time, the generator automatically switches to external reception mode and has the ability to synchronize with other generators.
■Features
・Output is 15kW, 35kW AC
・Parallel connection possible up to 280kW
・Left and right power ratio adjustable
・Automatic arcing control mechanism
・Automatic tuning mechanism
・Water cooling
・Compact design
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Product
Sputter power supply pulse generator bipolar pulse generator SB series 15kW-35kW
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Handling Company
Sputtering Components Japan Co., Ltd.
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Categories
2 Models of Sputter power supply pulse generator bipolar pulse generator SB series 15kW-35kW
Items marked with have different values depending on the model number.
Click on the part number for more information about each product
| Product Image | Part Number | Price (excluding tax) | DC-output (+/–V) | DC-output (W) | DC-output (kHz) | Product number |
|---|---|---|---|---|---|---|
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SB150 |
Available upon quote | 800V | 15kW | 20kHz | 11Z070 |
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SB300 |
Available upon quote | 800V | 35kW | 20kHz | 11Z050 |
Click on the part number for more information about each product
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