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  4. Sputter power supply Pulse generator Bipolar pulse generator HXB series 90kW-140kW (Sputtering Components Japan Co., Ltd.)
Sputter power supply Pulse generator Bipolar pulse generator HXB series 90kW-140kW-HXB900
Sputter power supply Pulse generator Bipolar pulse generator HXB series 90kW-140kW-Sputtering Components Japan Co., Ltd.

Sputter power supply Pulse generator Bipolar pulse generator HXB series 90kW-140kW
Sputtering Components Japan Co., Ltd.

Sputtering Components Japan Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

9.6hours

Fast Response

About This Product

MF/Bipolar Pulse Generators HXB900 to HXB1400 provide large output, compact design, and fast arc control in one cabinet. This bipolar pulse generator is specifically designed for reactive sputter processes with cathode lengths up to 4 m. This machine is equipped with an automatic symmetric function that distributes power evenly to the left and right cathodes in a dual cathode, and a power ratio control function that intentionally adjusts the distributed power up to 10:90%. This optimizes the deposition quality and target life. The generator fully automatically recognizes all relevant process parameters and continuously adjusts arcing detection and suppression. There is no need for the operator to make any parameter adjustments at the start of production or when replacing targets. In addition, the powerful water cooling mechanism ensures high reliability even in non-temperature-controlled environments.

■Features

・Output from 90kW to 140kW ・Water cooling ・Reactive sputtering - Compatible with cathodes up to 4m in length ・Automatic symmetrical adjustment system ・Asymmetrical power ratio control up to 10:90 ・Fully automatic arc control (0.3 mJ / kW)

  • Product

    Sputter power supply Pulse generator Bipolar pulse generator HXB series 90kW-140kW

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4 Models of Sputter power supply Pulse generator Bipolar pulse generator HXB series 90kW-140kW

Click on the part number for more information about each product

Image Part Number Price (excluding tax) Product number DC-output (kHz) DC-output (W) DC-output (+/–V)
Sputter power supply Pulse generator Bipolar pulse generator HXB series 90kW-140kW-Part Number-HXB900

HXB900

Available upon quote

14Z210

20kHz

90kW

800V

Sputter power supply Pulse generator Bipolar pulse generator HXB series 90kW-140kW-Part Number-HXB1050

HXB1050

Available upon quote

14Z020

20kHz

105kW

800V

Sputter power supply Pulse generator Bipolar pulse generator HXB series 90kW-140kW-Part Number-HXB1200

HXB1200

Available upon quote

14Z030

20kHz

120kW

800V

Sputter power supply Pulse generator Bipolar pulse generator HXB series 90kW-140kW-Part Number-HXB1400

HXB1400

Available upon quote

14Z040

20kHz

140kW

800V

Click on the part number for more information about each product

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About Company Handling This Product

Sputtering Components Japan Co., Ltd.

Response Rate

100.0%

Response Time

9.6hrs

  • Japan

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