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Rotary cathode magnet bar-TRM bar
Rotary cathode magnet bar-MQRM bar
Rotary cathode magnet bar-QRM bar
Rotary cathode magnet bar-Sputtering Components Japan Co., Ltd.

Sputtering Components Japan Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

9.6hours

Fast Response


About This Product

■By switching from a conventional planar cathode to a rotary cathode, you can expect the following benefits.

・Improved target usage efficiency, up to 85% or more ・Improved sputtering rate, up to 3 times (compared to planer) ・Minimization of particles caused by nodules SCI of the United States offers a variety of rotary cathodes, so you can choose the most suitable model according to your equipment configuration.

  • Product

    Rotary cathode magnet bar

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3 Models of Rotary cathode magnet bar

Click on the part number for more information about each product

Image Part Number Price (excluding tax) Adjacent screw allowable height difference Magnetic field adjustment screw Magnetic force Structure Maximum available target Nominal distribution Nominal target usage efficiency Screw position Sputter angle
Rotary cathode magnet bar-Part Number-TRM bar

TRM bar

Available upon quote

Maximum 3mm

+2mm-7mm

582 Gauss at outer diameter 150mm

3 in a row

Outer diameter 160mm

±2% or less

70% or more

Approximately every 300mm

±12 degrees

Rotary cathode magnet bar-Part Number-MQRM bar

MQRM bar

Available upon quote

Max 2mm

+2mm-8mm

764 Gauss at outer diameter 150mm

4 consecutive

Outer diameter 170mm

±2% or less

85% or more

Approximately every 300mm

±15 degrees

Rotary cathode magnet bar-Part Number-QRM bar

QRM bar

Available upon quote

Max 2mm

+2mm-7mm

1,056 gauss at outer diameter 150mm

4 consecutive

Outer diameter 180mm

±2% or less

85% or more

Approximately every 300mm

±21 degrees

Click on the part number for more information about each product

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About Company Handling This Product

Response Rate

100.0%


Response Time

9.6hrs

  • Japan

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