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  2. Rotary cathode Special rotary cathode for RF power supply (Sputtering Components Japan Co., Ltd.)
Rotary cathode Special rotary cathode for RF power supply-Rotary RF
Rotary cathode Special rotary cathode for RF power supply-Sputtering Components Japan Co., Ltd.

Rotary cathode Special rotary cathode for RF power supply
Sputtering Components Japan Co., Ltd.

About This Product

■By switching from a conventional planar cathode to a rotary cathode, you can expect the following benefits.

・Improved target usage efficiency, up to 85% or more ・Improved sputtering rate, up to 3 times (compared to planer) ・Minimization of particles caused by nodules SCI of the United States offers a variety of rotary cathodes, so you can choose the most suitable model according to your equipment configuration.

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    Rotary cathode Special rotary cathode for RF power supply

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1 Models of Rotary cathode Special rotary cathode for RF power supply

Image Part Number Price (excluding tax)
Rotary cathode Special rotary cathode for RF power supply-Part Number-Rotary RF

Rotary RF

Available upon quote

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Sputtering Components Japan Co., Ltd.

  • Japan

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