Rotary cathode side mount type end block-SM

Rotary cathode side mount type end block-M.M.

Rotary cathode side mount type end block-CM

Rotary cathode side mount type end block-Swing Cathode

Rotary cathode side mount type end block-Sputtering Components Japan Co., Ltd.

Rotary cathode side mount type end block
Sputtering Components Japan Co., Ltd.

Sputtering Components Japan Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

9.6hours

Fast Response

About This Product

■By switching from a conventional planar cathode to a rotary cathode, you can expect the following benefits.・Improved target usage efficiency, up to 85% or more
・Improved sputtering rate, up to 3 times (compared to planer)
・Minimization of particles caused by nodules

SCI of the United States offers a variety of rotary cathodes, so you can choose the most suitable model according to your equipment configuration.

Model
There are 4 models for this product.

Product
Rotary cathode side mount type end block

Handling Company
Sputtering Components Japan Co., Ltd.

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4 Models of Rotary cathode side mount type end block

Click on the part number for more information about each product

Image	Part Number	Price (excluding tax)	Horizontal/vertical mounting	Maximum input power	Dedicated motor and belt	Compatible target length	Fully cantilevered	Magnet angle
	SM	Available upon quote	Both possible	200kW at DC/ 80kHz at MFAC	Include	Up to 4,000mm	1500mm allows up to 140kg or less	360 degrees freely adjustable
	M.M.	Available upon quote	Both possible	100kW at DC/ 80kHz at MFAC	Include	Up to 2,500mm	Possible up to 140kg at 1000mm	360 degrees freely adjustable
	CM	Available upon quote	Both possible	20kW at DC/ 80kHz at MFAC	Include	Up to 1,000mm	750mm allows up to 45kg	360 degrees freely adjustable
	Swing Cathode	Available upon quote	Both possible	200kW at DC/ 80kHz at MFAC	Include	Up to 4,000mm	-	-

Click on the part number for more information about each product

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About Company Handling This Product

Sputtering Components Japan Co., Ltd.

Response Rate

100.0%

Response Time

9.6hrs

Japan

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