Rotary cathode Special rotary cathode for omnidirectional film formation-IM

Rotary cathode Special rotary cathode for omnidirectional film formation
Sputtering Components Japan Co., Ltd.

Sputtering Components Japan Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

9.6hours

Fast Response

About This Product

■By switching from a conventional planar cathode to a rotary cathode, you can expect the following benefits.・Improved target usage efficiency, up to 85% or more
・Improved sputtering rate, up to 3 times (compared to planer)
・Minimization of particles caused by nodules

SCI of the United States offers a variety of rotary cathodes, so you can choose the most suitable model according to your equipment configuration.

Model
There are 1 models for this product.

Product
Rotary cathode Special rotary cathode for omnidirectional film formation

Handling Company
Sputtering Components Japan Co., Ltd.

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1 Models of Rotary cathode Special rotary cathode for omnidirectional film formation

Image	Part Number	Price (excluding tax)	Horizontal/vertical mounting	Onboard target	Maximum input power	Compatible target length	Magnet angle	Type
	IM	Available upon quote	Both possible	Inner diameter 125mm, inner diameter 80mm, both available	60kW at DC or MFAC	Up to 2,000mm	The target does not rotate, and only the magnetic bar rotates 360 degrees during film deposition.	Special cathode for 360 degree outer circumference film formation

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About Company Handling This Product

Sputtering Components Japan Co., Ltd.

Response Rate

100.0%

Response Time

9.6hrs

Japan

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Rotary cathode Special rotary cathode for omnidirectional film formation Sputtering Components Japan Co., Ltd.

Sputtering Components Japan Co., Ltd.'s Response Status

About This Product

■By switching from a conventional planar cathode to a rotary cathode, you can expect the following benefits.

1 Models of Rotary cathode Special rotary cathode for omnidirectional film formation

IM

Other products of Sputtering Components Japan Co., Ltd.

About Company Handling This Product

Rotary cathode Special rotary cathode for omnidirectional film formation
Sputtering Components Japan Co., Ltd.