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  2. Rotary cathode Drop-in cathode for small diameter targets (Sputtering Components Japan Co., Ltd.)
Rotary cathode Drop-in cathode for small diameter targets-CC80
Rotary cathode Drop-in cathode for small diameter targets-Sputtering Components Japan Co., Ltd.

Rotary cathode Drop-in cathode for small diameter targets
Sputtering Components Japan Co., Ltd.

Sputtering Components Japan Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

9.6hours

Fast Response

About This Product

■By switching from a conventional planar cathode to a rotary cathode, you can expect the following benefits.

・Improved target usage efficiency, up to 85% or more ・Improved sputtering rate, up to 3 times (compared to planer) ・Minimization of particles caused by nodules SCI of the United States offers a variety of rotary cathodes, so you can choose the most suitable model according to your equipment configuration.

  • Product

    Rotary cathode Drop-in cathode for small diameter targets

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1 Models of Rotary cathode Drop-in cathode for small diameter targets

Image Part Number Price (excluding tax) Horizontal/vertical mounting Maximum input power Dedicated motor and belt Compatible target length Magnet angle Type End block width Outboard support block TTS adjustment
Rotary cathode Drop-in cathode for small diameter targets-Part Number-CC80

CC80

Available upon quote

Both possible

20kW at DC/MFAC

Include

Up to 1,000mm

Adjustable

For inner diameter 80mm target

122mm

Include

Possible by inserting a spacer

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About Company Handling This Product

Sputtering Components Japan Co., Ltd.

Response Rate

100.0%

Response Time

9.6hrs

  • Japan

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