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  2. Rotary cathode Drop-in swing cathode (Sputtering Components Japan Co., Ltd.)
Rotary cathode Drop-in swing cathode-MCS
Rotary cathode Drop-in swing cathode-Sputtering Components Japan Co., Ltd.

Rotary cathode Drop-in swing cathode
Sputtering Components Japan Co., Ltd.

Sputtering Components Japan Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

9.6hours

Fast Response

About This Product

■By switching from a conventional planar cathode to a rotary cathode, you can expect the following benefits.

・Improved target usage efficiency, up to 85% or more ・Improved sputtering rate, up to 3 times (compared to planer) ・Minimization of particles caused by nodules SCI of the United States offers a variety of rotary cathodes, so you can choose the most suitable model according to your equipment configuration.

  • Product

    Rotary cathode Drop-in swing cathode

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1 Models of Rotary cathode Drop-in swing cathode

Image Part Number Price (excluding tax) Horizontal/vertical mounting Maximum input power Dedicated motor and belt Compatible target length Magnet angle Type End block width Outboard support block TTS adjustment
Rotary cathode Drop-in swing cathode-Part Number-MCS

MCS

Available upon quote

Both possible

100kW at DC/ 80kHz at MFAC

Include

Up to 2,500mm

Can be swung during operation

MC-Swing for medium-sized boards

211mm

Include

Possible by inserting a spacer

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About Company Handling This Product

Sputtering Components Japan Co., Ltd.

Response Rate

100.0%

Response Time

9.6hrs

  • Japan

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