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Rotary cathode drop-in type end block-SC
Rotary cathode drop-in type end block-MC-D
Rotary cathode drop-in type end block-T.C.
Rotary cathode drop-in type end block-Compact-MC
Rotary cathode drop-in type end block-Sputtering Components Japan Co., Ltd.

Rotary cathode drop-in type end block
Sputtering Components Japan Co., Ltd.

Sputtering Components Japan Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

9.6hours

Fast Response


About This Product

■By switching from a conventional planar cathode to a rotary cathode, you can expect the following benefits.

・Improved target usage efficiency, up to 85% or more ・Improved sputtering rate, up to 3 times (compared to planer) ・Minimization of particles caused by nodules SCI of the United States offers a variety of rotary cathodes, so you can choose the most suitable model according to your equipment configuration.

  • Product

    Rotary cathode drop-in type end block

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4 Models of Rotary cathode drop-in type end block

Click on the part number for more information about each product

Image Part Number Price (excluding tax) Horizontal/vertical mounting Maximum input power Dedicated motor and belt Compatible target length Magnet angle Type End block width Outboard support block TTS adjustment
Rotary cathode drop-in type end block-Part Number-SC

SC

Available upon quote

Both possible

200kW at DC/ 80kHz at MFAC

Include

Up to 4,000mm

Adjustable in 15 degree increments

For large boards

204mm

Include

Possible by inserting a spacer

Rotary cathode drop-in type end block-Part Number-MC-D

MC-D

Available upon quote

Both possible

100kW at DC/ 80kHz at MFAC

Include

Up to 2,500mm

360 degree stepless adjustment

For medium-sized boards

160mm

Include

Possible by inserting a spacer

Rotary cathode drop-in type end block-Part Number-T.C.

T.C.

Available upon quote

Both possible

40kW at DC/ 80kHz at MFAC

Include

Up to 1,500mm

360 degrees freely adjustable

For small boards

58mm

Double-sided type

Possible by inserting a spacer

Rotary cathode drop-in type end block-Part Number-Compact-MC

Compact-MC

Available upon quote

Both possible

100kW at DC/ 80kHz at MFAC

Include

Up to 2,500mm

360 degree adjustable in 10 degree increments

CMC For medium-sized boards

125mm

Include

Possible by inserting a spacer

Click on the part number for more information about each product

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About Company Handling This Product

Response Rate

100.0%


Response Time

9.6hrs

  • Japan

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