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  2. Neutral gas flow analysis in vacuum equipment Atmospheric reentry analysis 3D diluted gas analysis software DSMC-Neutrals (Wavefront Co., Ltd.)
Neutral gas flow analysis in vacuum equipment Atmospheric reentry analysis 3D diluted gas analysis software DSMC-Neutrals-DSMC-Neutrals
Neutral gas flow analysis in vacuum equipment Atmospheric reentry analysis 3D diluted gas analysis software DSMC-Neutrals-Wavefront Co., Ltd.

Neutral gas flow analysis in vacuum equipment Atmospheric reentry analysis 3D diluted gas analysis software DSMC-Neutrals
Wavefront Co., Ltd.

About This Product

DSMC-Neutrals is a three-dimensional dilute gas analysis software using the Direct Simulation Monte Carlo method (DSMC - Direct Simulation Monte Carlo). Like general CAE analysis software, it uses unstructured meshes to support simulations of complex shapes. The specialty of this software is the simulation of dilute gases (dilute fluids) where fluid models cannot be applied due to low pressure. The DSMC method, which is based on the Monte Carlo method, calculates the behavior of simulated particles in the computational domain using a model that is close to the actual phenomenon. Flows can be solved without using special physical models. It is also possible to calculate the free molecular flow region without considering collisions.

■Features

Similar to fluid models, it is also possible to calculate chemical reactions using Arrhenius-type reaction equations. Since it can handle evaporation, desorption, and adsorption of particles, it can be applied to vacuum deposition, chemical vapor deposition, etc. It can also be applied to exhaust simulation using a turbo molecular pump (TMP - Turbo Molecular Pump) in which structures are moved, behavior calculations of sliders on hard disks, narrow flow path calculations, etc.

■Main achievements

There are simulations of thin film formation in semiconductor manufacturing such as chemical vapor deposition (CVD), vacuum evaporation, organic light emitting diode (OLED), and molecular beam epitaxy (MBE). We also have a track record of vacuum pumping simulations to check conductance, pumping time, etc. Other application fields include simulation of film formation (CIGS film) in CIGS (CIS) type solar cells, which has been attracting attention recently, and gas flow simulation of plasma-based devices such as AIP Arc Ion Plating. There is analysis etc. As for high pressure calculations, we have a proven track record in calculating the behavior of hard disk sliders.

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    Neutral gas flow analysis in vacuum equipment Atmospheric reentry analysis 3D diluted gas analysis software DSMC-Neutrals

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