General semiconductor micro particle picker CAP-series
PFA Co., Ltd.
About This Product
■Summary
This is a device that detects foreign substances on image sensors and semiconductors and removes them with a gel stick.
■Features
・Can detect particles as small as Φ2μm
・One-shot inspection with FOV10mm square
・Equipment with a thoroughly clean structure
・Gel stick has no device damage due to position and load control
・Equipped with automatic gel stick replacement function
- Gel stick maker trays can be set during operation.
・Small device size with good installation space efficiency
・Can also be equipped with a buffer conveyor for inline connection
*Detection ability depends on the target workpiece and particle shape, so prior evaluation is required.
*High-resolution specifications that support detection of 0.5 to 1 μm are also under development.
■Usage example
This is a device that detects foreign substances on image sensors and semiconductors and removes them with a gel stick.
*Please note that the appearance and specifications may be partially changed in order to improve performance.
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Product
General semiconductor micro particle picker CAP-series
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Handling Company
PFA Co., Ltd.
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Categories
1 Models of General semiconductor micro particle picker CAP-series
| Product Image | Part Number | Price (excluding tax) | Cleanliness | Conveyance path line | Drive source | Equipment dimensions and mass | Equipment tact | Target carrier size | Target product size | Target products | Usage environment |
|---|---|---|---|---|---|---|---|---|---|---|---|
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CAP-series |
Available upon quote |
ISO Class4 *Near the carrier adsorption stage of the inspection stage |
950+15/-10mm *SMEMA compliant |
Input power Single phase AC200V~220V, 20A air 0.5MPa, 20NL/min dry clean air vacuum Vacuum pump included |
Main body: width 1,010 x depth 900 x height 1,650 mm Buffer conveyor section: width 470 x depth 380 x height 1,210 mm *Excluding protrusions such as FFU (HEPA unit) and patrol lights |
1.2 seconds/piece UPH3000 (No. of foreign objects 0 pieces/carrier) 2.1 seconds/piece UPH1750 (number of foreign objects 3 pieces/carrier) |
L: 186~200mm W: 45~110mm T: 0.2~2mm |
5×5mm~15×15mm | Image sensors, glass filters, and other semiconductor products |
Temperature 25±5℃ Humidity 30~70% |
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About Company Handling This Product
- Japan