Film thickness distribution measuring device FiDiCa® D series wide range model FDC-D30HU-FDC-D30HU

Film thickness distribution measuring device FiDiCa® D series wide range model FDC-D30HU
JFE Techno Research Co., Ltd.

About This Product

■Measure and visualize film thickness distribution quickly and accurately without contact・A two-dimensional spectroscopic interference film thickness meter that can map the film thickness distribution of semiconductors, films, liquid films, etc. without contact at high speed and with high precision.
・Supports measurement of a wide range of film thicknesses (thin film, thick film, extremely thick film) from 50 nm to 800 μm
・High measurement accuracy using spectral interferometry
・High-speed calculation of measurement data from 1 million to 4 million points in a few minutes using a unique algorithm
・Can be customized from offline desktop equipment to inline equipment
・Supports multilayer film measurement

■What is film thickness measurement using optical interference?Film thickness measurement using optical interference is a standard method in the semiconductor and film industries that determines film thickness values ​​from the spectral intensity (spectrum) of interference that occurs between light reflected from the front and back surfaces of the measurement target. FiDiCa® has a rich lineup and can measure film thicknesses from 50nm to 800μm.

As a concrete example
・For semiconductors: Thickness of oxide film, resist, etc. on silicon wafer. It is also possible to control the thickness of various wafers themselves. Based on the film thickness information on the surface, it is possible to not only check whether the thickness is within the control value, but also detect trends in the thickness and local defects.
- For films: It is possible to measure not only the thickness unevenness of the original film, but also coatings and multilayers on top of it. (Depends on the material and layer structure) By using the film thickness information on the surface, it is possible to inspect streak-like defects and unevenness in the width direction, which was impossible with conventional point film thickness meters.
・Other examples: It is used in a wide range of applications where thickness control is an issue, such as electronic components, semiconductor materials, oil films, liquid films, and adhesives.

■Features・Can measure a wide range of film thickness from thin to thick films (FDC-D30HU)
・Full-surface sample measurement and local high-resolution (50μm) measurement (FDC-D3020)
・Model with CtoC conveyor available

Model
There are 1 models for this product.

Product
Film thickness distribution measuring device FiDiCa® D series wide range model FDC-D30HU

Handling Company
JFE Techno Research Co., Ltd.

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Meters & Instruments

Film Thickness Meters

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1 Models of Film thickness distribution measuring device FiDiCa® D series wide range model FDC-D30HU

Image	Part Number	Price (excluding tax)	Measurement film thickness range	Equipment size	Repeatability	Spatial resolution	Measurement speed	Measurement application	Number of measurement points	Measurement size
	FDC-D30HU	Available upon quote	50nm~100μm *Depends on material and conditions.	Depends on specifications	3σ＜1.0nm *With a calibrated SiO2 film on a 1 μm thick Si wafer.	Approximately 5μm~150μm	Within 10 minutes *Depends on material and conditions.	Thin film to thick film measurement	Approximately 4 million items	4~12 inch wafer (selectable)

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About Company Handling This Product

JFE Techno Research Co., Ltd.

Japan

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Film thickness distribution measuring device FiDiCa® D series wide range model FDC-D30HU JFE Techno Research Co., Ltd.

About This Product

■Measure and visualize film thickness distribution quickly and accurately without contact

■What is film thickness measurement using optical interference?

■Features

1 Models of Film thickness distribution measuring device FiDiCa® D series wide range model FDC-D30HU

FDC-D30HU

Customers who viewed this product also viewed

Other products of JFE Techno Research Co., Ltd.

About Company Handling This Product

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Film thickness distribution measuring device FiDiCa® D series wide range model FDC-D30HU
JFE Techno Research Co., Ltd.