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Film thickness distribution measuring device FiDiCa® S series standard modelHandling Company
JFE Techno Research Co., Ltd.Categories
Image | Part Number | Price (excluding tax) | Measurement film thickness range | Equipment size | Repeatability | Spatial resolution | Measurement speed | Number of measurement points | Measurement size |
---|---|---|---|---|---|---|---|---|---|
FDC-S□□□□ |
Available upon quote |
50nm~20μm (thin film model) |
Approximately W810×D820~880×H2,000mm |
3σ<1.0nm (thin film/thick film model) |
Approximately 50μm~150μm (thin film model) |
Within 2 minutes |
Approximately 4 million points (thin film model) |
4 inch ~ 12 inch wafer |
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