Film thickness distribution measuring device FiDiCa® S series standard model
JFE Techno Research Co., Ltd.
About This Product
■Measure and visualize film thickness distribution quickly and accurately without contact
・A two-dimensional spectroscopic interference film thickness meter that can map the film thickness distribution of semiconductors, films, liquid films, etc. without contact at high speed and with high precision.
・Supports measurement of a wide range of film thicknesses (thin film, thick film, extremely thick film) from 50 nm to 800 μm
・High measurement accuracy using spectral interferometry
・High-speed calculation of measurement data from 1 million to 4 million points in a few minutes using a unique algorithm
・Can be customized from offline desktop equipment to inline equipment
・Supports multilayer film measurement
■What is film thickness measurement using optical interference?
Film thickness measurement using optical interference is a standard method in the semiconductor and film industries that determines film thickness values from the spectral intensity (spectrum) of interference that occurs between light reflected from the front and back surfaces of the measurement target. FiDiCa® has a rich lineup and can measure film thicknesses from 50nm to 800μm.
As a concrete example
・For semiconductors: Thickness of oxide film, resist, etc. on silicon wafer. It is also possible to control the thickness of various wafers themselves. Based on the film thickness information on the surface, it is possible to not only check whether the thickness is within the control value, but also detect trends in the thickness and local defects.
- For films: It is possible to measure not only the thickness unevenness of the original film, but also coatings and multilayers on top of it. (Depends on the material and layer structure) By using the film thickness information on the surface, it is possible to inspect streak-like defects and unevenness in the width direction, which was impossible with conventional point film thickness meters.
・Other examples: It is used in a wide range of applications where thickness control is an issue, such as electronic components, semiconductor materials, oil films, liquid films, and adhesives.
■Features
・High-speed measurement of 1 million to 4 million points within 2 minutes ・Film thickness calculation
・Applicable to a variety of applications with a rich lineup
・Applicable from research and development to defect inspection
■Main uses
・Thin film model: SiO2 film, sputtered film, resist, liquid film, oil film, coating film
・Thick film model: various wafers, PET film, other films, glass, etc.
・Extremely thick film model: various wafers, bulk wafers, films, glass, etc.
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Product
Film thickness distribution measuring device FiDiCa® S series standard model
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Handling Company
JFE Techno Research Co., Ltd.
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Categories
1 Models of Film thickness distribution measuring device FiDiCa® S series standard model
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