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  2. Composite beam processing observation device JIB-4700F (Cosmo Trading Co., Ltd.)
Composite beam processing observation device JIB-4700F-JIB-4700F
Composite beam processing observation device JIB-4700F-Cosmo Trading Co., Ltd.

Composite beam processing observation device JIB-4700F
Cosmo Trading Co., Ltd.

About This Product

As the structures of advanced materials become finer and their processes become more complex, evaluation techniques such as morphological observation, elemental analysis, and crystal analysis are required to have higher resolution and accuracy. We have developed the composite beam processing and observation device JIB-4700F as a tool to meet these needs.

■Features

The SEM column is equipped with a hybrid conical objective lens, GENTLEBEAM™ (GB) mode, and an in-lens detector system, achieving a guaranteed resolution of 1.6 nm at a low accelerating voltage of 1 kV. High-resolution observation and high-speed analysis are possible when combined with an "in-lens Schottky electron gun" that can obtain an electron beam with a maximum irradiation current of 300nA. The FIB column uses a high current density Ga ion beam with a maximum irradiation current of 90nA to process samples at high speed. High-resolution SEM observation after high-speed cross-section processing using FIB and high-speed analysis using various analysis devices such as EDS (energy dispersive X-ray spectrometer) and EBSD (crystal orientation analysis system) are possible. It also comes standard with a three-dimensional analysis function that automatically processes cross-sections at regular intervals while acquiring SEM images.

■High-resolution SEM observation

Equipped with an electromagnetic field superimposition type conical objective lens, GB mode, and an in-lens detector, a guaranteed resolution of 1.6 nm is achieved at a low acceleration voltage of 1 kV.

■High-speed analysis

Combining an in-lens Schottky electron gun and an automatic aperture angle optimization lens, it maintains high resolution even during large irradiation current analysis.

■High-speed processing

A high-power Ga ion beam column processes samples at high speed.

■Strengthening the detection system

The simultaneous detection system, which includes a newly developed in-lens detector, allows real-time observation of images from up to four detectors.

■Extensibility

Compatible with a variety of optional attachments such as EDS, EBSD, cryo-transfer systems, cooling stages, and non-atmosphere-exposed transfer systems.

■Three-dimensional observation, three-dimensional analysis

By combining high-resolution SEM and various analysis units (optional), it is possible to visualize observed images and analysis data in three dimensions.

■Stage linkage function

The stage linkage function with the atmospheric pickup system (optional) allows for easy TEM sample extraction.

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    Composite beam processing observation device JIB-4700F

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1 Models of Composite beam processing observation device JIB-4700F

Image Part Number Price (excluding tax) SEM sample stage SEM irradiation current SEM detector (optional) SEM resolution (at optimal WD) SEM incident voltage SEM magnification FIB irradiation current FIB acceleration voltage FIB processing shape FIB image resolution FIB multiplier
Composite beam processing observation device JIB-4700F-Part Number-JIB-4700F

JIB-4700F

Available upon quote

Computer-controlled 6-axis goniometer stage
X: 50 mm, Y: 50 mm, Z: 1.5 ~ 40 mm, R: 360°, T: -5 ~ 70°,
FZ: -3.0 ~ +3.0 mm

1pA ~ 300nA

LED, UED (optional USD, BED, TED, EDS)

1.2 nm (15 kV, GB mode)
1.6 nm (1 kV, GB mode)

0.1~30.0kV

X20 ~ 1,000,000 (with LDF mode)

1 pA ~ 90 nA, 13 steps

1~30kV

Rectangle, line, point, circle, bitmap

4.0nm (30kV)

X50 ~ 1,000,000 (x50 ~ 90 is possible with acceleration voltage 15kV or less)

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About Company Handling This Product

Cosmo Trading Co., Ltd.

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