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Focused ion beam processing and observation equipment JIB-PS500i FIB-SEM system-JIB-PS500i
Focused ion beam processing and observation equipment JIB-PS500i FIB-SEM system-Cosmo Trading Co., Ltd.

Focused ion beam processing and observation equipment JIB-PS500i FIB-SEM system
Cosmo Trading Co., Ltd.


About This Product

■New sample preparation solution

JIB-PS500i provides three solutions to assist in TEM specimen preparation. From sample preparation to TEM observation, you can work with a reliable and high-throughput workflow.

■TEM-LINKAGE

The biaxially tilted cartridge and TEM holder make it easy to link TEM⇔FIB. The cartridge can be attached to the dedicated TEM sample holder with one touch.

■CHECK-AND-GO

In order to reliably prepare TEM samples, it is important to be able to check the prepared samples on the spot. With JIB-PS500i, you can seamlessly transition from TEM sample preparation to STEM observation. By repeating thin section processing and STEM observation, satisfactory specimens can be prepared.

■AUTOMATIC PREPARATION

Automatic TEM sample preparation system STEMPLING2 automates TEM sample preparation. Since sample preparation is performed automatically, there is no variation in quality due to operator skill.

■Signal detection system

Multiple detectors are available, including standard equipment SED, UED, and iBED. By selecting the optimal detector according to the application, it is possible to effectively observe a variety of samples.

■High resolution SEM imaging

Equipped with a newly developed superconical lens system in the SEM column, the observation performance at low accelerating voltages has been greatly improved. As a SEM for confirming the end point of thin section processing, it can obtain clear images with good contrast so that the end point of processing is not overlooked.

■SEM imaging of FIB-prepared cross section

The ultra-compact and thin retractable backscattered electron detector RBED can be used even when the stage is tilted. Optimal SEM observation can be performed not only for observing the sample surface, but also for observing FIB cross sections that require oblique observation, using a variety of detectors, including the secondary electron detector SED and upper detector UED.

■EDS integration software

EDS analysis function has been incorporated into the main unit control software. Elemental analysis of samples can be performed without switching software. (This is possible only when equipped with JEOL EDS.)

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    Focused ion beam processing and observation equipment JIB-PS500i FIB-SEM system

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1 Models of Focused ion beam processing and observation equipment JIB-PS500i FIB-SEM system

Image Part Number Price (excluding tax) Sample stage Sample movement range Sample stage method Sample stage control SEM electron gun SEM Aperture Optimized Lens (ALC) SEM long focal length (LDF) mode SEM sample bias voltage SEM standard detector SEM objective lens SEM incident voltage SEM image resolution SEM magnification SEM beam current FIB movable aperture FIB acceleration voltage FIB processing shape FIB image resolution FIB multiplier FIB beam current FIB ion source
Focused ion beam processing and observation equipment JIB-PS500i FIB-SEM system-Part Number-JIB-PS500i

JIB-PS500i

Available upon quote

X: 130mm
Y: 130mm
Z: 1.0 mm ~40 mm
T:-40.0~93.0°
R: 360.0° endless

Full eucentric goniometer stage

Computer controlled 5 axis motor drive
3D interference detection AVERT Engine

In-lens shot key Plus
field emission electron gun

Built-in

Built-in

0.0~-5.0kV

Secondary electron detector (SED),
Upper electron detector (UED),
In-lens backscattered electron detector (iBED)

Super conical lens

0.01~30kV

0.7nm (15kV)
1.4nm (1kV)
1.0 nm (1 kV, BD mode)

×50 ~ ×1,000,000 (STD mode)
×1,000 ~ ×1,000,000 (UHR mode)
×10 ~ ×19,000 (LDF mode)

Approximately 1 pA~500 nA or more

Motor drive 16 steps switching
(3 stages are spare)

0.5~30kV

Rectangle, circle, polygon, point, line,
bitmap shapes

3 nm (at 30 kV)

×50 ~ ×300,000 (Limited by acceleration voltage)

1.0 pA ~100 nA,
13-step switching (30 kV)

Ga liquid metal ion source

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