Various FPD components Ultra-wide field confocal/high resolution 1μm micro defect inspection laser scanning imager
Y Drive Co., Ltd.
About This Product
■Ultra-wide-field confocal/high-resolution 1μm micro defect inspection laser scanning imager
Conventional microscope optical systems and SEMs can observe narrow areas with high resolution, but cannot easily observe large areas. Laser scanning imagers solve this problem. Can measure 3D shapes in a 50 x 50 mm area.
- Capable of measuring shapes at a maximum inclination of 45 degrees.
・Can detect defects such as scratches and deep holes.
■Features of laser scanning imager
・A new observation device that overcomes the drawbacks of conventional microscopes, CCD cameras, and line sensors (no need for lighting equipment)
・Newly developed dedicated scanning lens with a wide observation area (more than 100 times that of a microscope) and long WD ・High contrast laser confocal optical unit
・The first raster scanning method in a laser confocal microscope optical system (equipped with a multi-scan function that allows you to acquire large-area images with long, large images)
- General specifications: High scanning resolution (maximum 20,000 points per scan), scanning speed 4,000 lines/sec, laser uses LD405nm (650 and 830nm are also available)
・This is the first device that allows you to view enlarged images on a computer monitor.
■Applications of laser scanning imager
・Observation and detection of surface defects on transparent films, glass, etc.
・Detection of micro-crack defects in ceramics, etc.
・Observation of peeling of deposited film, etc.
・Non-contact shape measurement of small diameter lenses and small molds Acquisition of precision 3D data over a large range
・Precise measurement of minute surface warpage
・Measurement using precise interference fringes over a large area, inspection of scratches, and observation of objects that are difficult to see with an optical microscope.
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Product
Various FPD components Ultra-wide field confocal/high resolution 1μm micro defect inspection laser scanning imager
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Handling Company
Y Drive Co., Ltd.
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Categories
1 Models of Various FPD components Ultra-wide field confocal/high resolution 1μm micro defect inspection laser scanning imager
| Product Image | Part Number | Price (excluding tax) | Measurement time | Measurement width |
|---|---|---|---|---|
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Micro defect inspection laser scanning imager |
Available upon quote | 1μm resolution approximately 35 seconds, 5μm resolution approximately 10 |
0.8μm Depth: 5nm |
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About Company Handling This Product
- Japan