Engineering ceramic aluminum nitride (ALN)
Shimizu Shokai Co., Ltd.
About This Product
■Summary
Aluminum nitride is a nitride of aluminum and is a material with extremely high thermal conductivity. It has excellent heat dissipation, insulation, and thermal shock resistance, and is attracting attention as a substrate material. Metallization processing is possible for aluminum nitride substrates.
■Features
・High thermal conductivity and thermal emissivity, and high heat uniformity
- Resistant to thermal shock and can withstand rapid heating and cooling
・Excellent electrical insulation
・Low thermal expansion matching that of Si prevents wafer deformation due to temperature changes and reduces particle generation due to peeling of deposited film.
・High corrosion resistance against fluorine gases
・Excellent plasma resistance
■Applications
Plasma etcher parts, wafer chuck parts, wafer holding jigs for steppers, dummy wafers, heater soaking plates, semiconductor substrates, thin film circuit boards
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Product
Engineering ceramic aluminum nitride (ALN)
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Handling Company
Shimizu Shokai Co., Ltd.
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Categories
2 Models of Engineering ceramic aluminum nitride (ALN)
Items marked with have different values depending on the model number.
Click on the part number for more information about each product
| Product Image | Part Number | Price (excluding tax) | Bending strength 20° (Mpa) | Bulk density ( g/cm3) | Color | Dielectric constant 1MHz | Dielectric strength (kV/mm) | External dimensions | Fracture toughness (Mpa･m1/2) | Hardness (HV) (Gpa) | Linear expansion coefficient RT~200℃ ( ×10^-6/℃) | Linear expansion coefficient RT~400℃ | Main component | Plate thickness dimension | Poisson's ratio | Thermal conductivity 20℃ ( W/ ( m･K) ) | Thermal emissivity (100%) | Thermal shock resistance (℃) | Volume resistivity 20℃ (Ω･cm) | Water absorption rate (%) | Young's modulus (Gpa) |
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Aluminum nitride (ALN) |
Available upon quote | 350 | 3 | Beige | 8.8 | 15 | □200, □300, φ200, φ300, etc. | 3 | 13 | 2.4 | 4.5 | A.L.N. | 0.25~30mm | 0.29 | 170 | 0.9 | 400 | >10^13 | 0 | 320 |
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Aluminum nitride (ALN) (without auxiliary agent) |
Available upon quote | 300 | 3.2 | Beige | 8.8 | 15 | □200, □300, φ200, φ300, etc. | 3 | 13 | 2.4 | 4.5 | A.L.N. | 0.25~30mm | 0.29 | 90 | 0.93 | 400 | >10^13 | 0 | 430 |
Click on the part number for more information about each product
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About Company Handling This Product
- Japan