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Engineering ceramic aluminum nitride (ALN)-Aluminum nitride (ALN)
Engineering ceramic aluminum nitride (ALN)-Shimizu Shokai Co., Ltd.

Engineering ceramic aluminum nitride (ALN)
Shimizu Shokai Co., Ltd.


About This Product

■Summary

Aluminum nitride is a nitride of aluminum and is a material with extremely high thermal conductivity. It has excellent heat dissipation, insulation, and thermal shock resistance, and is attracting attention as a substrate material. Metallization processing is possible for aluminum nitride substrates.

■Features

・High thermal conductivity and thermal emissivity, and high heat uniformity - Resistant to thermal shock and can withstand rapid heating and cooling ・Excellent electrical insulation ・Low thermal expansion matching that of Si prevents wafer deformation due to temperature changes and reduces particle generation due to peeling of deposited film. ・High corrosion resistance against fluorine gases ・Excellent plasma resistance

■Applications

Plasma etcher parts, wafer chuck parts, wafer holding jigs for steppers, dummy wafers, heater soaking plates, semiconductor substrates, thin film circuit boards

  • Product

    Engineering ceramic aluminum nitride (ALN)

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2 Models of Engineering ceramic aluminum nitride (ALN)

Click on the part number for more information about each product

Image Part Number Price (excluding tax) Dielectric constant 1MHz Color Thermal shock resistance (℃) Linear expansion coefficient RT~400℃ Linear expansion coefficient RT~200℃ ( ×10^-6/℃) Dielectric strength (kV/mm) Hardness (HV) (Gpa) Fracture toughness (Mpa・m1/2) Thermal emissivity (100%) Thermal conductivity 20℃ ( W/ ( m・K) ) Plate thickness dimension Bending strength 20° (Mpa) Bulk density ( g/cm3) External dimensions Water absorption rate (%) Volume resistivity 20℃ (Ω・cm) Main component Young's modulus (Gpa) Poisson's ratio
Engineering ceramic aluminum nitride (ALN)-Part Number-Aluminum nitride (ALN)

Aluminum nitride (ALN)

Available upon quote

8.8

Beige

400

4.5

2.4

15

13

3

0.9

170

0.25~30mm

350

3

□200, □300, φ200, φ300, etc.

0

>10^13

A.L.N.

320

0.29

Engineering ceramic aluminum nitride (ALN)-Part Number-Aluminum nitride (ALN) (without auxiliary agent)

Aluminum nitride (ALN) (without auxiliary agent)

Available upon quote

8.8

Beige

400

4.5

2.4

15

13

3

0.93

90

0.25~30mm

300

3.2

□200, □300, φ200, φ300, etc.

0

>10^13

A.L.N.

430

0.29

Click on the part number for more information about each product

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