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CVD equipment Rotating CVD equipment for C coating on Si negative electrode materials MPCVD-Powder-MPCVD-Powder
CVD equipment Rotating CVD equipment for C coating on Si negative electrode materials MPCVD-Powder-Microphase Co., Ltd.

CVD equipment Rotating CVD equipment for C coating on Si negative electrode materials MPCVD-Powder
Microphase Co., Ltd.

Microphase Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

126.2hours


About This Product

For carbon coating on powder surfaces/various heat treatments, etc.

■Purpose

This is a rotary tube furnace CVD device for CVD coating a carbon film on the surface of Si or graphite negative electrode powder samples.

■Features

・This is a CVD device that enables CVD processing by rotating the quartz furnace tube with a motor and stirring the powder sample. ・The rotating mechanism can operate in both normal pressure mode and reduced pressure mode, achieving even and uniform CVD processing and heat treatment. - As an optional feature, a pulsed gas control unit can be added to efficiently exchange fresh gas between narrow particles, resulting in higher uniformity. ・Ideal for carbon coating on lithium ion battery negative electrode materials and carbon coating on ceramic powder surfaces ・Other functions follow MPCVD-50

  • Product

    CVD equipment Rotating CVD equipment for C coating on Si negative electrode materials MPCVD-Powder

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1 Models of CVD equipment Rotating CVD equipment for C coating on Si negative electrode materials MPCVD-Powder

Image Part Number Price (excluding tax) Tubular furnace applicable tube outer diameter Tube furnace temperature control Tubular furnace regular operating temperature Tubular furnace external dimensions Tubular furnace breaker capacity Vacuum gauge Furnace tube material Furnace tube size Exhaust pump external dimensions Exhaust pump Gas control introduced gas type Gas control external dimensions (box) Gas control
CVD equipment Rotating CVD equipment for C coating on Si negative electrode materials MPCVD-Powder-Part Number-MPCVD-Powder

MPCVD-Powder

Available upon quote

~50mmφ

1-zone programmable temperature controller

400~1,000℃

W550mm×H300mm×D450mm

AC100V 20A single phase 50/60Hz

Bourdon tube vacuum gauge

Quartz

OD50mm×ID45mm×L800mm

W156mm×H200mm×D300mm

Rotary pump

Carrier gas: N2 or Ar
Reducing gas: H2
Hydrocarbon gas: C2H2 or C2H4 or CH4

W250mm×H310mm×D450mm

Mass flow controller

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About Company Handling This Product

Response Rate

100.0%


Response Time

126.2hrs

Company Overview

Microphase Co. Ltd., established in 1999 and headquartered in Ibaraki, Japan, is a manufacturer of nanotechnol...

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  • Japan

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