Vacuum gas displacement polyimide cure oven 450PB12-2P-CP-450PB12-2P-CP

Vacuum gas displacement polyimide cure oven 450PB12-2P-CP
HiSOL,Inc.

HiSOL,Inc.'s Response Status

Response Rate

100.0%

Response Time

40.5hours

About This Product

This is a tabletop batch oven that can be heated in a vacuum environment or inert gas atmosphere (N2, Ar etc.). Temperature control recipes can be easily set on the touch panel screen on the front of the device. Achieves heat treatment in a clean environment while maintaining high temperature distribution uniformity within the chamber.

■Application・Polyimide, BCB (photosensitive resin resistant to heat above 350 degrees), low-k material (interlayer insulation film material) curing
・Curing of polyimide film (insulating film) in WLP (wafer level packaging) and RDL (redistribution layer formation) processes
・Cu, Al annealing
・Cu oxide film removal etc…

■Equipment features・Heat treatment in a clean environment
・Up to 450℃ heating, high temperature uniformity
・Reliably removes oxygen in the chamber (oxygen concentration 10ppm or less, oxygen concentration monitor option available)
・The patented laminar flow method keeps the workpiece and chamber clean after heat treatment.
・Independent air-cooled cabinet system cools the chamber without affecting the work being heated
・Easily create recipes using the front touch panel display. Number of recipe memories is 8 types
・Reduced gas consumption by creating a low-pressure environment inside the chamber and performing heat treatment

chamber design
■Patented laminar flow methodThe YES PB series chamber has a gas generation plenum on top and a suction plenum on the bottom, allowing preheated process gas (usually N2) to flow parallel to the vertically placed wafer. Laminar flow (parallel laminar flow) is effective in removing and preventing particles from adhering to the workpiece surface.

■Equipped with a particle removal filter inside the chamberThe preheated process gas passes through a 100um particle filter, reaches the workpiece, passes through the workpiece, passes through the filter again, and is discharged outside the chamber. In addition to being able to heat the workpiece in a clean environment, it prevents particle scattering and eliminates the effect on chamber vacuum exhaust and gas inlet.

■Convection cooling mechanismThe 450PB chamber is surrounded by a separate cabinet equipped with cooling air inlets and exhaust ducts. All cooling is done from outside the chamber, so the workpieces being processed inside are not exposed to cooling air. In addition, the temperature of the air after cooling the chamber is lowered before exhausting, and the air is exhausted in a safe manner.

Model
There are 1 models for this product.

Product
Vacuum gas displacement polyimide cure oven 450PB12-2P-CP

Handling Company
HiSOL,Inc.

Categories

Heat Sources

Vacuum Ovens

100+ people viewing

Free
Get started with our free quotation service - no cost, no obligation.

No Phone Required
We respect your privacy. You can receive quotes without sharing your phone number.

1 Models of Vacuum gas displacement polyimide cure oven 450PB12-2P-CP

Image	Part Number	Price (excluding tax)	Power supply voltage	Weight (approx.)	Oxygen concentration	Applicable clean room	Setting time	Temperature uniformity (25 sheets/cassette)	Time setting resolution	Average heating rate (150-450℃)	Average cooling rate (450-150℃)	External dimensions (approx.) W×D×H	Operating temperature	Control unit dimensions (approx.) W×D×H	Number of recipes	Mass flow controller	Process gas input	Process area dimensions (approx.) W×D×H	Chamber material	Chamber internal dimensions (approx.) ID x D	Cleanliness inside the chamber	Number of steps	Capacity (25 sheets/cassette)	N2 flow rate (consumption)
	450PB12-2P-CP	Available upon quote	Three phase 208V 40A 50/60Hz	406kg	10 ppm or less Option: Oxygen concentration meter	Class 10	0 – 99 hours	±7℃	1 minute	6.5℃/min	3.5℃/min	89.5×174.5×139cm	Room temperature – 450℃ (optional 550℃)	59×96×24 cm	8	Options (up to 3 lines can be added)	Standard 1 system (optional 3 systems)	38×74×36cm	SUS 316L	53×104cm	Class 1	16	12″ wafer 2 cassettes	1 SCFM (15-25 liters/min)

Customers who viewed this product also viewed

Reviews shown here are reviews of companies.

Vacuum drying open OSK 97BM VO

Ogawa Seiki Co., Ltd.

4.8

500+ people viewing

Last viewed: 4 hours ago

Response time: 14.70 hours

Vacuum Ovens

12 models listed

High precision oven OSK 97BM FO

Ogawa Seiki Co., Ltd.

4.8

550+ people viewing

Last viewed: 5 hours ago

Response time: 14.70 hours

Vacuum Ovens

12 models listed

250℃ vacuum dryer OSK 93TI301

Ogawa Seiki Co., Ltd.

4.8

830+ people viewing

Last viewed: 14 minutes ago

Response time: 14.70 hours

Vacuum Ovens

15 models listed

400℃ vacuum dryer OSK 93TI302

Ogawa Seiki Co., Ltd.

4.8

300+ people viewing

Response time: 14.70 hours

Vacuum Ovens

9 models listed

High capacity precision temperature control vacuum dryer OSK 93TI303

Ogawa Seiki Co., Ltd.

4.8

260+ people viewing

Last viewed: 12 hours ago

Response time: 14.70 hours

Vacuum Ovens

6 models listed

Vacuum gas displacement polyimide cure oven 450PB8-2P-CP

HiSOL,Inc.

110+ people viewing

Last viewed: 20 hours ago

Response time: 40.54 hours

Vacuum Ovens

3 models listed

Large vacuum oven

Mita Sangyo Co., Ltd.

210+ people viewing

Vacuum Ovens

3 models listed

See More Vacuum Ovens Products

Other products of HiSOL,Inc.

Reviews shown here are reviews of companies.

Probe card

HiSOL,Inc.

30+ people viewing

Last viewed: 30 minutes ago

Response time: 40.54 hours

Probe Cards

Atmospheric pressure lamp annealing equipment RTP/RTA 8 inch compatible AccuThermo AW820M

HiSOL,Inc.

30+ people viewing

Last viewed: 3 hours ago

Response time: 40.54 hours

Annealing Furnaces

IC socket burn-in test

HiSOL,Inc.

30+ people viewing

Response time: 40.54 hours

BGA Scokets

2 models listed

Capillary for ball bonding

HiSOL,Inc.

30+ people viewing

Response time: 40.54 hours

Capillaries

Tabletop UV curing furnace lamp type UV PITARI

HiSOL,Inc.

30+ people viewing

Last viewed: 18 hours ago

Response time: 40.54 hours

Ultraviolet (UV) Dryers

Measuring Instruments/Measuring Systems Ellipsometer

HiSOL,Inc.

30+ people viewing

Last viewed: 2 hours ago

Response time: 40.54 hours

Ellipsometers

Laser microprocessing equipment

HiSOL,Inc.

30+ people viewing

Last viewed: 16 hours ago

Response time: 40.54 hours

Microfabrication Machines

Tabletop multi-wire bonder (ball & wedge type) MODEL-7KE

HiSOL,Inc.

90+ people viewing

Last viewed: 6 hours ago

Response time: 40.54 hours

Semiconductor Manufacturing Equipment Component & Part Machining

3 models listed

Desktop manual wedge bonder E series

HiSOL,Inc.

90+ people viewing

Last viewed: 5 hours ago

Response time: 40.54 hours

Wire Bonders

Tabletop manual deep access wedge bonder MODEL-7476D (7600D specification)

HiSOL,Inc.

110+ people viewing

Last viewed: 21 hours ago

Response time: 40.54 hours

Wire Bonders

Die Bonder Epoxy Die Bonder Model 7200CR

HiSOL,Inc.

30+ people viewing

Last viewed: 17 hours ago

Response time: 40.54 hours

Auto flip chip bonder MODEL-400

HiSOL,Inc.

100+ people viewing

Response time: 40.54 hours

Flip Chip Bonders

2 models listed

View more products of HiSOL,Inc.

About Company Handling This Product

HiSOL,Inc.

Response Rate

100.0%

Response Time

40.5hrs

Company Overview

Hisol Inc., established in 1967 as Kan Electronics, is a manufacturer based in Tokyo, Japan, producing machine...

Japan

Related search keywords

This is the version of our website addressed to speakers of English in the United States. If you are a resident of another country, please select the appropriate version of Metoree for your country in the drop-down menu.

Vacuum gas displacement polyimide cure oven 450PB12-2P-CP HiSOL,Inc.

HiSOL,Inc.'s Response Status

About This Product

■Application

■Equipment features

■Patented laminar flow method

■Equipped with a particle removal filter inside the chamber

■Convection cooling mechanism

1 Models of Vacuum gas displacement polyimide cure oven 450PB12-2P-CP

450PB12-2P-CP

Customers who viewed this product also viewed

Other products of HiSOL,Inc.

About Company Handling This Product

Related search keywords

Vacuum gas displacement polyimide cure oven 450PB12-2P-CP
HiSOL,Inc.