Vacuum lamp annealing equipment (RTP/RTA) AccuThermo AW820V-AW820V

Vacuum lamp annealing equipment (RTP/RTA) AccuThermo AW820V
HiSOL,Inc.

HiSOL,Inc.'s Response Status

Response Rate

100.0%

Response Time

40.5hours

About This Product

The AccuThermo series high-speed heat treatment equipment is an infrared lamp annealing equipment (RTP/RTA system) that heats wafers at a maximum temperature of 1250℃ and a heating rate of 100℃/sec using powerful visible to infrared light irradiation.

AccuThermo AW820V is a vacuum RTP/RTA capable of annealing up to 8-inch wafers, 16 x 2-inch wafers, 5 x 3-inch wafers, and 4 x 4-inch wafers in vacuum or in any process gas atmosphere. It's a system. This is a high performance and highly reliable lamp annealing system that can be used for research and development and prototyping as well as small lot production.

■Application・Activation treatment after ion implantation
・Ohmic contact formation
・Annealing of compound semiconductors such as GaAs, GaN, InP, SiC, etc.
・Crystallization annealing of ferroelectric thin films such as PZT and SBT
・PV cell annealing
・Oxide film formation
・Silicide formation, salicide formation
・Poly silicon annealing treatment

■Features- Compatible with vacuum processes (achieved vacuum level 0.01Pa *when using turbo molecular pump)
・Supports vacuum level adjustment control using throttle valve control.
・Supports high-speed heat treatment with a maximum temperature of 1250℃ and a maximum heating rate of 150℃/sec. *When processing standard Si wafers
・Improved heat uniformity (within Δ10℃) by lamp zone output control (10 zones)
・Clean heat treatment with non-contact heating and cold wall structure.
・Process gas flow rate control using MFC (programmable, up to 5 systems of MFC can be incorporated)
・Temperature control algorithm optimized for RTA process.
・Recipe editing/saving, real-time process monitoring, and process data management using a built-in PC.
- Supports various calibrations including pyrometer calibration on software.
- Thorough safety measures such as watchdog timer, excessive temperature rise prevention, cooling water circulation flow monitoring, etc.

Model
There are 1 models for this product.

Product
Vacuum lamp annealing equipment (RTP/RTA) AccuThermo AW820V

Handling Company
HiSOL,Inc.

Categories

Machining / Machine Tools

Annealing Furnaces

20+ people viewing

Last viewed: 9 hours ago

Free
Get started with our free quotation service - no cost, no obligation.

No Phone Required
We respect your privacy. You can receive quotes without sharing your phone number.

1 Models of Vacuum lamp annealing equipment (RTP/RTA) AccuThermo AW820V

Image	Part Number	Price (excluding tax)	In-plane temperature uniformity	Cooling rate	Sample loading method	Vacuum adjustment range (optional)	Number of registered recipes	Temperature measurement accuracy	Temperature control range	Temperature control method	Heating rate	Compatible board size	Safety measures	External dimensions/weight	Heating method	Heating direction	Ultimate vacuum	Cooling method	Number of steps per recipe	Number of lamp zones	Process control method	Processing room, sample loading section	Number of process gas lines	Process gas type	Process gas flow control range	Chamber cooling method	Type	Main features of the software
	AW820V	Available upon quote	ΔT 10℃	10℃/sec~100℃/sec	Front loading (manual)	6.7Pa~1733Pa, atmospheric pressure	No limit	±1℃ (after calibration)	100℃~1,250℃	Closed-loop control with sensed temperature feedback	10℃/sec~100℃/sec	[Standard] φ5 inch ~ φ8 inch [Option] φ2 inch ~ φ4 inch [Option] 200mm × 200mm square board [Option] When using susceptor: Individual chips ~φ8 inch	Emergency stop switch, excessive temperature detection, cooling water monitoring, door opening/closing monitoring, watchdog timer, etc.	W978×D1,220×H1,780 mm・460kg	Infrared lamp radiant heating (1.5kW x 27, Top 13, Bottom 14)	2 directions, top and bottom	0.01Pa	Forced air cooling with gas purge	Up to 40 steps (In case of cyclic annealing, up to 99 loops are supported)	10 zone independent control	Equipment embedded computer board, RTAPro software, 17-inch touch screen, keyboard, mouse	Aluminum chamber with quartz windows on top and bottom, quartz tray	[Standard] 1 system (N2) [Option] Up to 5 lines	N2, O2, He, Ar, forming gas (hydrogen concentration approximately 5%)	[Standard] 0.2slpm~10slpm (controlled by MFC) [Option] 20sccm~1000sccm (controlled by MFC) etc.	Combined air cooling and water cooling	8 inch compatible	・Real-time process monitor ・Recipe editing, saving, reading ・Process data recall ・Process data output (Txt format) ・Various calibrations ・System diagnosis etc.

Customers who viewed this product also viewed

Reviews shown here are reviews of companies.

Industrial furnace / heat treatment device grilled furnace (Aneal furnace)

Sun Fars

240+ people viewing

Last viewed: 19 minutes ago

Response time: 30.83 hours

Annealing Furnaces

2 models listed

Atmospheric pressure lamp annealing equipment RTP/RTA 8 inch compatible AccuThermo AW820M

HiSOL,Inc.

30+ people viewing

Last viewed: 4 minutes ago

Response time: 40.54 hours

Annealing Furnaces

Vacuum heat treatment furnace with convection heating NVF-C type

Nakanihon Roko Kogyo Co., Ltd.

10+ people viewing

Last viewed: 13 minutes ago

Annealing Furnaces

ANNEAL Tabletop wafer annealing equipment

20+ people viewing

Annealing Furnaces

3 models listed

Lamp annealing equipment (high speed heat treatment equipment)

Pickling Co., Ltd.

100+ people viewing

Last viewed: 2 hours ago

Annealing Furnaces

3 models listed

Vacuum seam welding equipment (single type) Vacuum annealing equipment AANL860I

AKIM Co., Ltd.

40+ people viewing

Last viewed: 10 hours ago

Response time: 64.87 hours

Annealing Furnaces

2 models listed

Vacuum annealing equipment

Arios Co., Ltd.

40+ people viewing

Last viewed: 12 hours ago

Response time: 0.88 hours

Annealing Furnaces

3 models listed

Various heating furnaces (electric/far infrared) Far infrared annealing furnace

Irie Co., Ltd.

4.8

50+ people viewing

Last viewed: 16 hours ago

Response time: 13.25 hours

Annealing Furnaces

2 models listed

Atmospheric pressure lamp annealing equipment (RTP/RTA) AccuThermo AW610M

HiSOL,Inc.

50+ people viewing

Last viewed: 6 hours ago

Response time: 40.54 hours

Annealing Furnaces

Atmospheric pressure lamp annealing equipment (RTP/RTA) AccuThermo AW820M

HiSOL,Inc.

70+ people viewing

Last viewed: 17 minutes ago

Response time: 40.54 hours

Annealing Furnaces

Annealing furnace/annealing furnace (for enamelled wire/aluminum wire production)

Tanabe Co., Ltd.

60+ people viewing

Last viewed: 5 hours ago

Response time: 66.45 hours

Annealing Furnaces

3 models listed

Annealing furnace

STECH LIMITED.

30+ people viewing

Last viewed: 11 minutes ago

Annealing Furnaces

See More Annealing Furnaces Products

Other products of HiSOL,Inc.

Reviews shown here are reviews of companies.

Probe card

HiSOL,Inc.

30+ people viewing

Last viewed: 6 hours ago

Response time: 40.54 hours

Probe Cards

Atmospheric pressure lamp annealing equipment RTP/RTA 8 inch compatible AccuThermo AW820M

HiSOL,Inc.

30+ people viewing

Last viewed: 4 minutes ago

Response time: 40.54 hours

Annealing Furnaces

IC socket burn-in test

HiSOL,Inc.

30+ people viewing

Response time: 40.54 hours

BGA Scokets

2 models listed

Capillary for ball bonding

HiSOL,Inc.

30+ people viewing

Response time: 40.54 hours

Capillaries

Tabletop UV curing furnace lamp type UV PITARI

HiSOL,Inc.

30+ people viewing

Response time: 40.54 hours

Ultraviolet (UV) Dryers

Measuring Instruments/Measuring Systems Ellipsometer

HiSOL,Inc.

30+ people viewing

Last viewed: 9 hours ago

Response time: 40.54 hours

Ellipsometers

Laser microprocessing equipment

HiSOL,Inc.

30+ people viewing

Last viewed: 22 hours ago

Response time: 40.54 hours

Microfabrication Machines

Tabletop multi-wire bonder (ball & wedge type) MODEL-7KE

HiSOL,Inc.

90+ people viewing

Last viewed: 13 hours ago

Response time: 40.54 hours

Semiconductor Manufacturing Equipment Component & Part Machining

3 models listed

Desktop manual wedge bonder E series

HiSOL,Inc.

90+ people viewing

Last viewed: 19 minutes ago

Response time: 40.54 hours

Wire Bonders

Tabletop manual deep access wedge bonder MODEL-7476D (7600D specification)

HiSOL,Inc.

110+ people viewing

Last viewed: 1 minute ago

Response time: 40.54 hours

Wire Bonders

Die Bonder Epoxy Die Bonder Model 7200CR

HiSOL,Inc.

30+ people viewing

Response time: 40.54 hours

Auto flip chip bonder MODEL-400

HiSOL,Inc.

100+ people viewing

Last viewed: 12 minutes ago

Response time: 40.54 hours

Flip Chip Bonders

2 models listed

View more products of HiSOL,Inc.

About Company Handling This Product

HiSOL,Inc.

Response Rate

100.0%

Response Time

40.5hrs

Company Overview

Hisol Inc., established in 1967 as Kan Electronics, is a manufacturer based in Tokyo, Japan, producing machine...

Japan

Related search keywords

This is the version of our website addressed to speakers of English in the United States. If you are a resident of another country, please select the appropriate version of Metoree for your country in the drop-down menu.

Vacuum lamp annealing equipment (RTP/RTA) AccuThermo AW820V HiSOL,Inc.

HiSOL,Inc.'s Response Status

About This Product

■Application

■Features

1 Models of Vacuum lamp annealing equipment (RTP/RTA) AccuThermo AW820V

AW820V

Customers who viewed this product also viewed

Other products of HiSOL,Inc.

About Company Handling This Product

Related search keywords

Vacuum lamp annealing equipment (RTP/RTA) AccuThermo AW820V
HiSOL,Inc.