Atmospheric pressure lamp annealing equipment (RTP/RTA) AccuThermo AW820M-AW820M

Atmospheric pressure lamp annealing equipment (RTP/RTA) AccuThermo AW820M
HiSOL,Inc.

HiSOL,Inc.'s Response Status

Response Rate

100.0%

Response Time

40.5hours

About This Product

The AccuThermo series high-speed heat treatment equipment is an infrared lamp annealing equipment (RTP/RTA system) that heats wafers using powerful visible to infrared light irradiation at a maximum temperature of 1250℃ and a heating rate of 150℃/sec.

The AccuThermo AW820M is an atmospheric pressure RTP/RTA system capable of annealing up to 8-inch wafers, 16 x 2-inch wafers, 5 x 3-inch wafers, and 4 x 4-inch wafers, and is ideal for research, development, and prototyping purposes. In addition, it is a high performance and highly reliable lamp annealing system that can also be used for small lot production.

■Application・Activation treatment after ion implantation
・Ohmic contact formation
・Annealing of compound semiconductors such as GaAs, GaN, InP, SiC, etc.
・Crystallization annealing of ferroelectric thin films such as PZT and SBT
・PV cell annealing
・Oxide film formation
・Silicide formation, salicide formation
・Poly silicon annealing treatment

■Features・Supports high-speed heat treatment with a maximum temperature of 1250℃ and a maximum heating rate of 150℃/sec. *When processing standard Si wafers
・Can handle long-term processes of 1000℃/60min. *Please contact us for details.
・Improved heat uniformity (within Δ10℃) by lamp zone output control (10 zones)
・Clean heat treatment using non-contact heating, insulated quartz tube, and cold wall structure.
・Suitable for heat treatment with residual oxygen concentration of 10ppm or less using purge replacement method.
・Patented ERP pyrometer (450℃～1250℃) *Optional
・Process gas flow rate control using MFC (programmable, up to 6 systems of MFC can be incorporated)
・Temperature control algorithm optimized for RTA process.
-Quartz tube and quartz tray can be removed and replaced with simple operation. (Easy to clean deposit items)
・Recipe editing/saving, real-time process monitoring, and process data management using a built-in PC.
- Supports various calibrations including pyrometer calibration on software.
- Thorough safety measures such as watchdog timer, excessive temperature rise prevention, cooling water circulation flow monitoring, etc.
・Wafer automatic transfer possible *Optional

Model
There are 1 models for this product.

Product
Atmospheric pressure lamp annealing equipment (RTP/RTA) AccuThermo AW820M

Handling Company
HiSOL,Inc.

Categories

Machining / Machine Tools

Annealing Furnaces

60+ people viewing

Last viewed: 5 hours ago

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1 Models of Atmospheric pressure lamp annealing equipment (RTP/RTA) AccuThermo AW820M

Image	Part Number	Price (excluding tax)	In-plane temperature uniformity	Cooling rate	Sample loading method	Number of registered recipes	Temperature measurement accuracy	Temperature control range (Option) Pyrometer	Temperature control range (Option) Special-TC	Temperature control range TC	Temperature control method	Heating rate	Compatible board size	Safety measures	External dimensions/weight	Heating method	Heating direction	Cooling method	Number of steps per recipe	Number of lamp zones	Process control method	Processing room, sample loading section	Number of process gas lines	Process gas type	Process gas flow control range	Chamber material	Chamber cooling method	Type	Main features of the software
	AW820M	Available upon quote	ΔT 10℃	10℃/sec~150℃/sec	Front loading (manual)	No limit	TC: ±1℃ (after calibration), ERP pyrometer: ±4℃ (after calibration)	450℃~1,250℃	100℃~1,050℃	100℃~800℃	Closed-loop control with sensed temperature feedback	10℃/sec~150℃/sec	[Standard] φ5 inch ~ φ8 inch [Option] φ2 inch ~ φ4 inch [Option] 200mm×200mm square board [Option] When using susceptor: Individual chips ~φ8 inch	Emergency stop switch, excessive temperature detection, cooling water monitoring, door opening/closing monitoring, watchdog timer, etc.	W978×D1,220×H1,780mm・460kg	Infrared lamp radiant heating (1.5kW x 27, Top 13, Bottom 14)	2 directions, top and bottom	Forced air cooling with gas purge	Up to 40 steps (In case of cyclic annealing, up to 99 loops are supported)	10 zone independent control	Equipment embedded computer board, RTAPro software, 17-inch touch screen, keyboard, mouse	Quartz tube, quartz tray	[Standard] 1 system (N2) [Option] Up to 6 lines	N2, O2, He, Ar, forming gas (hydrogen concentration approximately 5%)	[Standard] 0.2slpm~10slpm (controlled by MFC) [Option] 20sccm~1000sccm (controlled by MFC) etc.	Aluminum alloy + diffuse reflective Au coating	Combined air cooling and water cooling	8 inch compatible	・Real-time process monitor ・Recipe editing, saving, reading ・Process data recall ・Process data output (Txt format) ・Various calibrations ・System diagnosis etc.

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About Company Handling This Product

HiSOL,Inc.

Response Rate

100.0%

Response Time

40.5hrs

Company Overview

Hisol Inc., established in 1967 as Kan Electronics, is a manufacturer based in Tokyo, Japan, producing machine...

Japan

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Atmospheric pressure lamp annealing equipment (RTP/RTA) AccuThermo AW820M HiSOL,Inc.

HiSOL,Inc.'s Response Status

About This Product

■Application

■Features

1 Models of Atmospheric pressure lamp annealing equipment (RTP/RTA) AccuThermo AW820M

AW820M

Customers who viewed this product also viewed

Other products of HiSOL,Inc.

About Company Handling This Product

Related search keywords

Atmospheric pressure lamp annealing equipment (RTP/RTA) AccuThermo AW820M
HiSOL,Inc.