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Double-sided semi-automatic prober HSP-150DS (6 inch)Handling Company
HiSOL,Inc.Categories
Image | Part Number | Price (excluding tax) | Compatible wafer size | Back side platen Z movement range | Stage θ movement range | Stage θ positioning resolution | Stage Z repeat accuracy | Stage Z movement range | Stage XY repeat accuracy | Stage XY movement range | Stage XY positioning accuracy | System weight | System dimensions (W×D×H) |
---|---|---|---|---|---|---|---|---|---|---|---|---|---|
HSP-150DS (6 inch) |
Available upon quote |
~φ150mm |
20mm (manual/automatic selection) |
±5° |
0.0002° |
<±1um |
20mm |
<±2um |
X: 160mm, Y: 250mm |
<±5um |
Approximately 750kg |
1,600×1100×1,700mm |
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Reviews shown here are reviews of companies.