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  4. Compact high and low temperature semi-automatic prober HSP-150SC (6 inch) (HiSOL,Inc.)
Compact high and low temperature semi-automatic prober HSP-150SC (6 inch)-HSP-150SC (6 inch)
Compact high and low temperature semi-automatic prober HSP-150SC (6 inch)-HiSOL,Inc.

Compact high and low temperature semi-automatic prober HSP-150SC (6 inch)
HiSOL,Inc.

HiSOL,Inc.'s Response Status

Response Rate

100.0%

Response Time

33.8hours

Relatively Fast Response

About This Product

The HSP-100SC/HSP-150SC semi-automatic prober is a semi-automatic probe system with a sealed chamber that can measure up to 4 inches (100mm) or up to 6 inches (150mm) wafers. It features a mechanical mechanism with high rigidity and excellent positioning accuracy and repeatability, intuitive and easy operability, advanced control software, and low noise and high precision measurement, supporting highly reliable semi-automatic on-wafer measurement. The probe and chuck are housed in a completely EMI-shielded environment with a shielded chamber structure, and can be used for small signal I-V/C-V measurements, impedance characteristic evaluations, and high It can be used for a wide range of applications such as power device measurements, sub THz RF measurements, and optoelectronic measurements.

■Application

・Temperature characteristic test from -60℃/-40℃ to +200℃/+300℃ ・Testing in an inert gas environment such as N2 or Ar (dew point temperature -70℃ or less, residual oxygen concentration 100ppm or less) ・Minute signal I-V measurement (fA level) ・Various C-V measurements (Quasi-Static C-V, HF-CV, RF-CV), impedance characteristic evaluation ・RF measurement (~67GHz) *Option: sub THz band RF measurement ・Ultra high-speed I-V measurement ・High power device measurement (200A Pulse, ±3kV triaxial, ±10kV coaxial)

■Extended application

・1/f noise evaluation, RTN (Random Telegraph Noise) evaluation ・Optoelectronics (LED, LD, VCSEL, PD, etc.) reception/emission characteristics evaluation application ・Sub THz band RF measurement ・Load pull measurement ・Wafer level reliability testing (EM, TDDB, HCI, NBTI, BT, etc.) *Continuous testing for over 240 hours is possible ・Probe card compatible (Multi-site WLR compatible)

  • Product

    Compact high and low temperature semi-automatic prober HSP-150SC (6 inch)

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1 Models of Compact high and low temperature semi-automatic prober HSP-150SC (6 inch)

Image Part Number Price (excluding tax) Compatible wafer size Stage θ movement range Stage θ positioning resolution Stage Z repeat accuracy Stage Z movement range Stage XY repeat accuracy Stage XY movement range Stage XY positioning accuracy System weight System dimensions (W×D×H)
Compact high and low temperature semi-automatic prober HSP-150SC (6 inch)-Part Number-HSP-150SC (6 inch)

HSP-150SC (6 inch)

Available upon quote

~φ150mm

±7.5°

0.0002°

＜±1um

20mm

＜±2um

X: 160mm, Y: 160mm

＜±5um

Approximately 800kg

1,300×750×1,600mm

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About Company Handling This Product

HiSOL,Inc.

Response Rate

100.0%

Response Time

33.8hrs

Company Overview

Hisol Inc., established in 1967 as Kan Electronics, is a manufacturer based in Tokyo, Japan, producing machine...

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  • Japan

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