Compact high and low temperature semi-automatic prober HSP-150SC (6 inch)
HiSOL,Inc.
About This Product
The HSP-100SC/HSP-150SC semi-automatic prober is a semi-automatic probe system with a sealed chamber that can measure up to 4 inches (100mm) or up to 6 inches (150mm) wafers.
It features a mechanical mechanism with high rigidity and excellent positioning accuracy and repeatability, intuitive and easy operability, advanced control software, and low noise and high precision measurement, supporting highly reliable semi-automatic on-wafer measurement. The probe and chuck are housed in a completely EMI-shielded environment with a shielded chamber structure, and can be used for small signal I-V/C-V measurements, impedance characteristic evaluations, and high It can be used for a wide range of applications such as power device measurements, sub THz RF measurements, and optoelectronic measurements.
■Application
・Temperature characteristic test from -60℃/-40℃ to +200℃/+300℃
・Testing in an inert gas environment such as N2 or Ar (dew point temperature -70℃ or less, residual oxygen concentration 100ppm or less)
・Minute signal I-V measurement (fA level)
・Various C-V measurements (Quasi-Static C-V, HF-CV, RF-CV), impedance characteristic evaluation
・RF measurement (~67GHz) *Option: sub THz band RF measurement
・Ultra high-speed I-V measurement
・High power device measurement (200A Pulse, ±3kV triaxial, ±10kV coaxial)
■Extended application
・1/f noise evaluation, RTN (Random Telegraph Noise) evaluation
・Optoelectronics (LED, LD, VCSEL, PD, etc.) reception/emission characteristics evaluation application
・Sub THz band RF measurement ・Load pull measurement
・Wafer level reliability testing (EM, TDDB, HCI, NBTI, BT, etc.) *Continuous testing for over 240 hours is possible
・Probe card compatible (Multi-site WLR compatible)
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Product
Compact high and low temperature semi-automatic prober HSP-150SC (6 inch)
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Handling Company
HiSOL,Inc.
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Categories
1 Models of Compact high and low temperature semi-automatic prober HSP-150SC (6 inch)
| Product Image | Part Number | Price (excluding tax) | Compatible wafer size | Stage XY movement range | Stage XY positioning accuracy | Stage XY repeat accuracy | Stage Z movement range | Stage Z repeat accuracy | Stage θ movement range | Stage θ positioning resolution | System dimensions (W×D×H) | System weight |
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HSP-150SC (6 inch) |
Available upon quote | ~φ150mm | X: 160mm, Y: 160mm | ＜±5um | ＜±2um | 20mm | ＜±1um | ±7.5° | 0.0002° | 1,300×750×1,600mm | Approximately 800kg |
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About Company Handling This Product
- Japan