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  4. Semi-automatic prober for high and low temperatures HSP-300SC (12 inch) (HiSOL,Inc.)
Semi-automatic prober for high and low temperatures HSP-300SC (12 inch)-HSP-300SC (12 inch)
Semi-automatic prober for high and low temperatures HSP-300SC (12 inch)-HiSOL,Inc.

Semi-automatic prober for high and low temperatures HSP-300SC (12 inch)
HiSOL,Inc.

HiSOL,Inc.'s Response Status

Response Rate

100.0%

Response Time

33.8hours

Relatively Fast Response

About This Product

The HSP-200SC/HSP-300SC semi-automatic prober is a semi-automatic probe system compatible with next-generation semiconductor devices that pursues low noise and low leakage for measuring up to 8 inches (200 mm) or up to 12 inches (300 mm) wafers. The probe and chuck are housed in a completely EMI-shielded environment with a shielded chamber structure, and the temperature control range -60°C to +300°C (special option +400°C) allows for ultra-small I-V signals in the extreme range. It supports automatic in-plane measurements such as C-V measurement, 1/f noise measurement, S-parameter acquisition, RTN (random telegraph noise) measurement, and high-speed I-V measurement. It is also available as an option for large current and high voltage power device applications.

■Application

・Temperature characteristic test from -60℃/-40℃ to +200℃/+300℃ ・Testing in an inert gas environment such as N2 or Ar (dew point temperature -70℃ or less, residual oxygen concentration 100ppm or less) ・Minute signal I-V measurement (fA level) ・Various C-V measurements (Quasi-Static C-V, HF-CV, RF-CV), impedance characteristic evaluation ・RF measurement (~67GHz) *Option: sub THz band RF measurement ・1/f noise evaluation ・RTN (Random Telegraph Noise) evaluation ・Ultra high-speed I-V measurement ・High power device measurement (200A Pulse, ±3kV triaxial, ±10kV coaxial) ・Probe card compatible (Multi-site WLR compatible)

■Extended application

・Optoelectronics (LED, LD, VCSEL, PD, etc.) reception/emission characteristics evaluation application ・Sub THz band RF measurement ・Load pull measurement ・Wafer level reliability testing (EM, TDDB, HCI, NBTI, BT, etc.) *Continuous testing for over 240 hours is possible

  • Product

    Semi-automatic prober for high and low temperatures HSP-300SC (12 inch)

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1 Models of Semi-automatic prober for high and low temperatures HSP-300SC (12 inch)

Image Part Number Price (excluding tax) Compatible wafer size Stage θ movement range Stage θ positioning resolution Stage Z repeat accuracy Stage Z movement range Stage XY repeat accuracy Stage XY movement range Stage XY positioning accuracy System weight System dimensions (W×D×H)
Semi-automatic prober for high and low temperatures HSP-300SC (12 inch)-Part Number-HSP-300SC (12 inch)

HSP-300SC (12 inch)

Available upon quote

~φ300mm

±7.5°

0.0002°

＜±1um

20mm

＜±2um

X: 310mm, Y: 310mm

＜±5um

Approximately 1,100kg

1,700×1,200×1,600mm

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About Company Handling This Product

HiSOL,Inc.

Response Rate

100.0%

Response Time

33.8hrs

Company Overview

Hisol Inc., established in 1967 as Kan Electronics, is a manufacturer based in Tokyo, Japan, producing machine...

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  • Japan

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